Thursday, October 6, 2022
10:00AM - 10:15AM
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ER2.00001: Low Bias Frequencies for High Aspect Ratio Plasma Etching
Evan Litch, Hyunjae Lee, Sang Ki Nam, Mark J Kushner
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Thursday, October 6, 2022
10:15AM - 10:30AM
Author not Attending
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ER2.00002: Effects of the focus ring on uniformity in capacitively coupled plasma etching reactors
Fang-Fang Ma, Quan-Zhi Zhang, Jing-Yu Sun, You-Nian Wang
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Thursday, October 6, 2022
10:30AM - 11:00AM
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ER2.00003: Development of validated fluorocarbon plasma chemistry for multi-dimensional modeling of semiconductor plasma etch processes
Invited Speaker:
Dmitry Levko
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Thursday, October 6, 2022
11:00AM - 11:15AM
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ER2.00004: Development of virtual metrology using plasma information to predict mask shape in HAR etch process
Jaemin Song, Namjae Bae, Jihoon Park, Taejun Park, Ji-Won Kwon, Sangwon Ryu, Ingyu Lee, Gon-Ho Kim
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Thursday, October 6, 2022
11:15AM - 11:30AM
Author not Attending
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ER2.00005: Electron-assisted photoresist etching in an inductively coupled oxygen plasma via low-energy electron beam
Jiwon Jung, Chin-Wook Chung
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Thursday, October 6, 2022
11:30AM - 11:45AM
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ER2.00006: Ar plasma nanostructuring of PTFE for the wettability transition from hydrophobic to superhydrophobic and hydrophilic surfaces
Vivek Pachchigar, Umesh K Gaur, Sooraj K. P., Sukriti Hans, Mukesh Ranjan
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Thursday, October 6, 2022
11:45AM - 12:00PM
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ER2.00007: Achieving selective etching of SiN and SiO2 over amorphous carbon during CF4/H2 by controlling substrate temperature
Shih-Nan Hsiao, Thi-Thuy-Nga Nguyen, Takayoshi Tsutsumi, Kenji Ishikawa, Makoto Sekine, Masaru Hori
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Thursday, October 6, 2022
1:30PM - 1:45PM
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ER4.00001: Experimental and computational study of the electron power absorption in capacitively coupled neon-oxygen plasmas
Aranka Derzsi, Peter Hartmann, Mate Vass, Benedek Horvath, Marton Gyulai, Ihor Korolov, Julian Schulze, Zoltan Donko
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Thursday, October 6, 2022
1:45PM - 2:00PM
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ER4.00002: Effect of voltage waveform tailoring and an additional 60 MHz frequency on the ion flux energy distribution function in a low pressure capacitively coupled radio frequency plasma
Gerrit Hübner, Ihor Korolov, Stefan Ries, Soheil Karimi Aghda, Jochen M Schneider, Jan Trieschmann, Thomas Mussenbrock, Julian Schulze, Peter Awakowicz, Tobias Gergs
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Thursday, October 6, 2022
2:00PM - 2:15PM
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ER4.00003: Stratification of Capacitively Coupled Plasma in Noble Gases
Vladimir I Kolobov, Robert Arslanbekov
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Thursday, October 6, 2022
2:15PM - 2:30PM
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ER4.00004: The mechanism of frequency coupling in low pressure dual-frequency capacitively coupled plasmas revisited based on the Boltzmann term analysis
Máté Vass, Li Wang, Sebastian Wilczek, Trevor Lafleur, Ralf Peter Brinkmann, Zoltan Donko, Julian Schulze
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Thursday, October 6, 2022
2:30PM - 2:45PM
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ER4.00005: Pressure dependence on spatio-temporal distribution of excitation rates of Ar 2p1 and Ne 2p1 in Ar and Ar/Ne capacitively coupled plasmas
Michihiro Otaka, Toshiaki Arima, Jian-syun Lai, Kizuki Ikeda, Kunihiro Kamataki, Naoto Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
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Thursday, October 6, 2022
2:45PM - 3:00PM
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ER4.00006: Generation of surface modes and plasma uniformity in VHF CCP reactors studied with a EM PIC code
Denis Eremin, Efe Kemaneci, Masaaki Matsukuma, Thomas Mussenbrock, Ralf Peter Brinkmann
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Thursday, October 6, 2022
3:00PM - 3:15PM
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ER4.00007: Current and voltage (I-V) characteristics of intermediate pressure plasma
Shadhin Hussain, Matthew Goeckner
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Thursday, October 6, 2022
3:15PM - 3:30PM
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ER4.00008: Wave Characteristics in E×B Source: Pressure-Dependent Evolution of Plasma Oscillation Phenomena
June Young Kim, Cheongbin Cheon, Jinyoung Choi, Y. S. Hwang, Kyoung-Jae Chung, Hae June Lee
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Thursday, October 6, 2022
4:00PM - 4:15PM
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ER5.00001: N2 vibrational kinetics in near atmospheric pressure nanosecond-pulsed plasma jet: simulations validated against measurements
Youfan He, Jan Kuhfeld, Nikita D Lepikhin, Dirk Luggenhoelscher, Uwe Czarnetzki, Vasco Guerra, Ralf Peter Brinkmann, Andrew R Gibson, Efe Kemaneci
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Thursday, October 6, 2022
4:15PM - 4:30PM
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ER5.00002: Optical diagnostic and reactive species characterization of atmospheric pressure argon plasma jet under various operating conditions
Psnsr R Srikar, Shaik Mahamad Allabakshi, Shihabudheen M Maliyekkal, Reetesh K Gangwar
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Thursday, October 6, 2022
4:30PM - 4:45PM
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ER5.00003: Investigation of multi-periodic self-trigger plasma in a AC-driven Atmospheric Pressure Plasma Jet
Hang Yang, Antoine Rousseau
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Thursday, October 6, 2022
4:45PM - 5:00PM
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ER5.00004: O2 influence on the spatio-temporal density of Ar(1s5) in micro-plasma jets with varying shieldings
Duarte Gonçalves, Gérard Bauville, Pascal Jeanney, Luis L Alves, Mário Lino da Silva, João Santos Sousa, Stéphane Pasquiers
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Thursday, October 6, 2022
5:00PM - 5:15PM
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ER5.00005: Influence of Voltage Pulse Off-Time on the Discharge Characteristics in Surface-Launched Plasma Bullets
Koki Sasaki, Atsumu Matsumoto, Jun-Seok Oh, Tatsuru Shirafuji
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Thursday, October 6, 2022
5:15PM - 5:30PM
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ER5.00006: Experiments and numerical simulation on the plasma bullets launched vertically from a dielectric surface
Tatsuru Shirafuji, Jun-Seok Oh
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Thursday, October 6, 2022
5:30PM - 5:45PM
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ER5.00007: Properties of an atmospheric He-based nanosecond jet discharge
Nikolay Britun, Peterraj Dennis Christy, Vladislav Gamaleev, Shih-Nan Hsiao, Masaru Hori
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Thursday, October 6, 2022
5:45PM - 6:00PM
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ER5.00008: Micro electric fields detection improvements: Steps toward tailoring cold atmospheric pressure plasma
Stephan Reuter
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