Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session ER4: Capacitively Coupled Plasmas II
1:30 PM–3:30 PM,
Thursday, October 6, 2022
Sendai International Center
Room: Hagi
Chair: Li Wang, Ruhr University Bochum, Germany
Abstract: ER4.00007 : Current and voltage (I-V) characteristics of intermediate pressure plasma*
3:00 PM–3:15 PM
Presenter:
Shadhin Hussain
(University of Texas at Dallas)
Authors:
Shadhin Hussain
(University of Texas at Dallas)
Matthew Goeckner
(University of Texas at Dallas)
*Applied Materials
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