76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023;
Michigan League, Ann Arbor, Michigan
Session Index
Session ER1: Modeling & Simulation III: Computational Methods
Chair: Parnika Agrawal, Applied Materials
Room: Michigan League, Vandenberg
Thursday, October 12, 2023
8:00AM - 8:15AM
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ER1.00001: Long-Timescale Numerical Modeling of Streamer Discharges
Lee Strobel, Carmen Guerra-Garcia
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Thursday, October 12, 2023
8:15AM - 8:30AM
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ER1.00002: Comparing Traditional and Physics-Informed Neural Network Solvers for Electron Kinetics in Low-Temperature Plasma
Lucius T Schoenbaum, Vladimir I Kolobov
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Thursday, October 12, 2023
8:30AM - 8:45AM
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ER1.00003: Comparative analysis of different plasma models and machine learning approaches for accurate plasma-parameter estimation
Prashant Sharma, Christopher J Fontes, Mark C Zammit, James Colgan, Hyun-Kyung Chung, Nathan Garland, Xianzhu Tang
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Thursday, October 12, 2023
8:45AM - 9:00AM
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ER1.00004: Data-driven modeling of an electrical corona discharge
Xuewei Zhang
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Session ER2: Modeling & Simulation IV: Low Pressure Plasma Sources
Chair: Kentaro Hara, Stanford University
Room: Michigan League, Vandenberg
Thursday, October 12, 2023
10:00AM - 10:30AM
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ER2.00001: Plasma Modeling and Diagnostics in Semiconductor Equipment Design
Invited Speaker:
Saravanapriyan Sriraman
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Thursday, October 12, 2023
10:30AM - 10:45AM
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ER2.00002: Effect of Electron Energy Distribution Functions on Plasma Behavior in Moderate-Pressure RF Capacitively Coupled Plasmas
Kallol Bera, Rupali Sahu, Nakul Nuwal, Abhishek Verma, Shahid Rauf
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Thursday, October 12, 2023
10:45AM - 11:00AM
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ER2.00003: Evaluating power deposition in Inductively Coupled Plasma systems using the particle-in-cell code VSim
Eve Lanham, Daniel S Main, John R Cary, Thomas G Jenkins, Jarrod Leddy, Scott E Kruger
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Thursday, October 12, 2023
11:00AM - 11:15AM
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ER2.00004: 3D effects in the simulations of the magnetized DC plasma sources for ion implantation.
Alexandre Likhanskii, Andrei Smolyakov, Mina Papahn Zadeh, Nirbhav S Chopra, Yevgeny Raitses
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Thursday, October 12, 2023
11:15AM - 11:30AM
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ER2.00005: Improved Closure Models for Fluid Moment Modeling of Capacitively Coupled Plasmas
Adnan Mansour, Alejandro Alvarez Laguna, Kentaro Hara
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Thursday, October 12, 2023
11:30AM - 11:45AM
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ER2.00006: Simulations of EUV Induced Hydrogen Plasmas and In-Situ Tin Cleaning
Tugba Piskin, Vladimir Volynets, Sang Ki Nam, Hyunjae Lee, Mark Kushner
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Thursday, October 12, 2023
11:45AM - 12:00PM
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ER2.00007: Atomic structure considerations for the low-temperature opacity of Xenon
Amanda Neukirch, James Colgan
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Session ER4: Low Pressure Capacitively Coupled Plasmas
Chair: Igor Kaganovich, Princeton Plasma Physics Laboratory
Room: Michigan League, Vandenberg
Thursday, October 12, 2023
1:30PM - 2:00PM
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ER4.00001: Electron power absorption mode transitions in low-pressure capacitively coupled plasmas in gas mixtures
Invited Speaker:
Aranka Derzsi
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Thursday, October 12, 2023
2:00PM - 2:15PM
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ER4.00002: Abstract Withdrawn
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Thursday, October 12, 2023
2:15PM - 2:30PM
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ER4.00003: The effects of different boundary surface materials on the electron power absorption dynamics in capacitive RF plasmas
Julian Schulze, Florian Beckfeld, Ranna Masheyeva, David Schulenberg, Ihor Korolov, Claudia Bock, Zoltán Donkó
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Thursday, October 12, 2023
2:30PM - 2:45PM
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ER4.00004: A hybrid surface cavity microwave source with a capacitively coupled plasma for plasma uniformity control
Navheen Shanmugham Murugesan, Laxminarayan L Raja
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Thursday, October 12, 2023
2:45PM - 3:00PM
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ER4.00005: Coupled ion-ion oscillation and periodic emission pattern in electronegative capacitively coupled radio-frequency plasmas
Tianhong Wang, Shahid Rauf, Niklas Friedrichs, Ihor Korolov, Jason Kenney, Julian Schulze
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Thursday, October 12, 2023
3:00PM - 3:15PM
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ER4.00006: Two-dimensional kinetic modeling of a weakly magnetized Capacitively Coupled Plasma Discharge in cylindrical geometry.
Willca Villafana, Shahid Rauf, Igor D Kaganovich
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Thursday, October 12, 2023
3:15PM - 3:30PM
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ER4.00007: Discharge properties of a cylindrical capacitively coupled plasma discharge with an axisymmetric magnetic field
Swati Swati, Pawandeep Singh, Sarveshwar Sharma, Nishant Sirse, Shantanu K Karkari
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