Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session ER2: Modeling & Simulation IV: Low Pressure Plasma Sources
10:00 AM–12:00 PM,
Thursday, October 12, 2023
Room: Michigan League, Vandenberg
Chair: Kentaro Hara, Stanford University
Abstract: ER2.00003 : Evaluating power deposition in Inductively Coupled Plasma systems using the particle-in-cell code VSim*
10:45 AM–11:00 AM
Presenter:
Eve Lanham
(Tech-X Corp)
Authors:
Eve Lanham
(Tech-X Corp)
Daniel S Main
(Tech-X Corp)
John R Cary
(University of Colorado, Boulder)
Thomas G Jenkins
(Tech-X Corporation)
Jarrod Leddy
(Tech-X Corp)
Scott E Kruger
(Tech-X Corp)
This work analyzes power deposition in ICP processing chambers using the VSim particle-in-cell code [3,4]. Modeling the high density plasmas generated in these systems is made tractable by using a 2D cylindrical simulation domain with a novel implicit solve to model the antenna. The simulation geometry chosen for this work is based on the Gaseous Electronics Conference reference cell operating in the ICP configuration with an He plasma discharge at 1-20 mTorr. Comparisons with other models will be made, and the conditions necessitating a fully-kinetic treatment of the plasma will be discussed.
[1] M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, John Wiley & Sons, Inc. (2005).
[2] M. J. Kushner, J. Phys. D. Appl. Phys. 42, 194013 (2009).
[3] C. Nieter and J. R. Cary, J. Comp. Phys. 196, 448 (2004).
[4] www.txcorp.com/vsim
*This material is based upon work supported by the Department of Energy under Award Number(s) DE-SC0020695
Follow Us |
Engage
Become an APS Member |
My APS
Renew Membership |
Information for |
About APSThe American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics. |
© 2024 American Physical Society
| All rights reserved | Terms of Use
| Contact Us
Headquarters
1 Physics Ellipse, College Park, MD 20740-3844
(301) 209-3200
Editorial Office
100 Motor Pkwy, Suite 110, Hauppauge, NY 11788
(631) 591-4000
Office of Public Affairs
529 14th St NW, Suite 1050, Washington, D.C. 20045-2001
(202) 662-8700