Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session ER4: Low Pressure Capacitively Coupled Plasmas
1:30 PM–3:30 PM,
Thursday, October 12, 2023
Room: Michigan League, Vandenberg
Chair: Igor Kaganovich, Princeton Plasma Physics Laboratory
Abstract: ER4.00006 : Two-dimensional kinetic modeling of a weakly magnetized Capacitively Coupled Plasma Discharge in cylindrical geometry.*
3:00 PM–3:15 PM
Presenter:
Willca Villafana
(Princeton Plasma Physics Laboratory)
Authors:
Willca Villafana
(Princeton Plasma Physics Laboratory)
Shahid Rauf
(Applied Materials)
Igor D Kaganovich
(Princeton Plasma Physics Laboratory)
In this work, we develop a procedure to control the plasma uniformity and its dynamics using a weak magnetic field with a 2D cylindrical axisymmetric model. The present investigation takes leverage of PIC modeling and uses the explicit EDIPIC-2D code [1]. A detailed analysis of the sheath structure, the ion flux, and IEDF at the wafer will be performed and compared to prior 1D models [2].
1 https://github.com/PrincetonUniversity/EDIPIC-2D
2 S. Patil, S. Sharma, S. Sengupta, A. Sen, and I. Kaganovich, “Electron bounce-cyclotron resonance in capacitive discharges at low magnetic fields,” Phys. Rev. Research 4(1), 013059 (2022).
*This Research was funded by the US Department of Energy through CRADA agreement with AMAT.
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