Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session ER2: Modeling & Simulation IV: Low Pressure Plasma Sources
10:00 AM–12:00 PM,
Thursday, October 12, 2023
Room: Michigan League, Vandenberg
Chair: Kentaro Hara, Stanford University
Abstract: ER2.00004 : 3D effects in the simulations of the magnetized DC plasma sources for ion implantation.
11:00 AM–11:15 AM
Presenter:
Alexandre Likhanskii
(Applied Materials)
Authors:
Alexandre Likhanskii
(Applied Materials)
Andrei Smolyakov
(Univ Saskatchewan)
Mina Papahn Zadeh
(Univ of Saskatchewan)
Nirbhav S Chopra
(Princeton Plasma Physics Laboratory)
Yevgeny Raitses
(Princeton Plasma Physics Laboratory)
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