Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session ER2: Modeling & Simulation IV: Low Pressure Plasma Sources
10:00 AM–12:00 PM,
Thursday, October 12, 2023
Room: Michigan League, Vandenberg
Chair: Kentaro Hara, Stanford University
Abstract: ER2.00006 : Simulations of EUV Induced Hydrogen Plasmas and In-Situ Tin Cleaning*
11:30 AM–11:45 AM
Presenter:
Tugba Piskin
(University of Michigan)
Authors:
Tugba Piskin
(University of Michigan)
Vladimir Volynets
(Samsung Electronics Co., Ltd.)
Sang Ki Nam
(Samsung Electronics Co. Ltd.)
Hyunjae Lee
(Samsung Electronics Co.)
Mark Kushner
(University of Michigan)
*Work supported by Samsung Electronics and the National Science Foundation.
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