Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session ER2: Modeling & Simulation IV: Low Pressure Plasma Sources
10:00 AM–12:00 PM,
Thursday, October 12, 2023
Room: Michigan League, Vandenberg
Chair: Kentaro Hara, Stanford University
Abstract: ER2.00002 : Effect of Electron Energy Distribution Functions on Plasma Behavior in Moderate-Pressure RF Capacitively Coupled Plasmas
10:30 AM–10:45 AM
Presenter:
Kallol Bera
(Applied Materials)
Authors:
Kallol Bera
(Applied Materials)
Rupali Sahu
(Applied Materials, Inc.)
Nakul Nuwal
(Applied Materials, Inc.)
Abhishek Verma
(Applied Materials)
Shahid Rauf
(Applied Materials)
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