76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023;
Michigan League, Ann Arbor, Michigan
Session Index
Session DR1: Plasma Surface Interaction I
Chair: Costel Biloiu, Applied Materials Inc
Room: Michigan League, Hussey
Thursday, October 12, 2023
8:00AM - 8:15AM
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DR1.00001: GEC Student Excellence Award Finalist Presentation - Combining in operando FTIR and Raman to investigate the plasma-surface interaction
Minseok Kim, Lorenzo Mangolini
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Thursday, October 12, 2023
8:15AM - 8:30AM
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DR1.00002: Investigation of Ammonia Production from Small Admixtures of Nitrogen in a Hydrogen Plasma Using Long Time of Flight Mass Spectrometry
James Ellis, Marco Thinius, Kai Kroll, Daniel Köpp, Norbert Lang, Thorsten Benter, Hendrik Kersten, Jean-Pierre h van Helden
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Thursday, October 12, 2023
8:30AM - 9:00AM
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DR1.00003: Probing surface reactivity in plasmas- is it valid to use a constant reaction probability model?
Invited Speaker:
Jean-Paul Booth
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Thursday, October 12, 2023
9:00AM - 9:15AM
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DR1.00004: GEC Student Excellence Award Finalist Presentation - Surface charge dynamics at the liquid/gas phase boundary of an argon bubble in water at varying conductivities.
Nicholas L Sponsel, Sophia Gershman, Kristina Pattison, Jacob T Mast, Katharina Stapelmann
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Thursday, October 12, 2023
9:15AM - 9:30AM
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DR1.00005: Estimation of Mean Electron Energy in Helium Surface Ionization Waves on Dielectric Substrates
Joshua Morsell, Kseniia Konina, Mark Kushner, Steven Shannon
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Session DR2: Plasma Surface Interaction II
Chair: Vincent Donnelly, University of Houston
Room: Michigan League, Hussey
Thursday, October 12, 2023
10:00AM - 10:15AM
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DR2.00001: Atomistic scale modeling of plasma-material interactions for enhanced amorphous carbon layer performance in semiconductor manufacturing
Byungjo Kim, Seokjun Hong, Hyunhak Jeong, Suyoung Yoo, Seongkeun Cho, Sang Ki Nam, Yihwan Kim
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Thursday, October 12, 2023
10:15AM - 10:30AM
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DR2.00002: Hybrid Molecular Dynamics-Machine Learning Approach for Efficient Modeling of Particle Growth in Non-Thermal Plasma
Paolo Elvati, Jacob Saldinger, Matt Raymond, Jonathan Lin, Angela Violi, Xuetao Shi
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Thursday, October 12, 2023
10:30AM - 11:00AM
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DR2.00003: Scale-Bridging Simulations for Plasma-Surface Interactions
Invited Speaker:
Tobias Gergs
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Thursday, October 12, 2023
11:00AM - 11:15AM
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DR2.00004: Characterization of Two-Surface Multipactor with Non-Sinusoidal RF Fields
Asif iqbal, De-Qi Wen, John P. Verboncoeur, Peng Zhang
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Thursday, October 12, 2023
11:15AM - 11:30AM
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DR2.00005: Atomic oxygen surface recombination in glow discharge plasmas
Pedro Viegas, José Afonso, Jorge Silveira, Tiago C Dias, Ana Sofía Morillo Candás, Luca Vialetto, Vasco Guerra
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Thursday, October 12, 2023
11:30AM - 11:45AM
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DR2.00006: Overcoming Surface Inactivation through Catalytic Design in Low-Temperature Plasma-Catalytic Conversion of Methane to Hydrogen
Varanasi Sai Subhankar, Charan R Nallapareddy, Thomas C Underwood
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Session DR4: Plasma Semiconductor & RF Applications
Chair: Uwe Czarnetzki, Ruhr-University Bochum, Faculty of Physics and Astronomy
Room: Michigan League, Hussey
Thursday, October 12, 2023
1:30PM - 1:45PM
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DR4.00001: Reactor-feature coupled model to extend Cu fill in BEOL using PVD
Parnika Agrawal, Prashanth Kothnur, Yida Lin, ShaoTing Ho, Xiangjin Xie, Phillip Stout
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Thursday, October 12, 2023
1:45PM - 2:00PM
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DR4.00002: Three-Dimensional Flow and Plasma Simulation for ICP Reactor with Different Injector Designs
Meihua Zhang, Yun Yang, Ryong Hwang, Jeonghee Jo, Sangdon Lee, Sergey Zaretskiy, Dongbeen Her, David Solomon
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Thursday, October 12, 2023
2:00PM - 2:30PM
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DR4.00003: Large-area overdense microwave plasmas
Invited Speaker:
Kallol Bera
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Thursday, October 12, 2023
2:30PM - 2:45PM
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DR4.00004: Design and Analysis of a Plasma-Based Reconfigurable and Frequency-Selective Rasorber
Md Tanvir Ahmed, Krushna Kanth Varikuntla, Abbas Semnani
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Thursday, October 12, 2023
2:45PM - 3:00PM
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DR4.00005: An EVA Cavity-Based Frequency-Selective Plasma Limiter
Sandeep Narasapura Ramesh, Abbas Semnani
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Thursday, October 12, 2023
3:00PM - 3:15PM
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DR4.00006: Impedance Matching in Small Antennas through Capacitively-Coupled Plasma Technique
Abbas Semnani, Kushagra Singhal, Samsud Moon
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Thursday, October 12, 2023
3:15PM - 3:30PM
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DR4.00007: A Conformal Plasma Frequency Selective Surface with Tunable and Switching Performance
Krushna Kanth Varikuntla, Abbas Semnani
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