Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session DR2: Plasma Surface Interaction II
10:00 AM–11:45 AM,
Thursday, October 12, 2023
Room: Michigan League, Hussey
Chair: Vincent Donnelly, University of Houston
Abstract: DR2.00001 : Atomistic scale modeling of plasma-material interactions for enhanced amorphous carbon layer performance in semiconductor manufacturing*
10:00 AM–10:15 AM
Presenter:
Byungjo Kim
(Mechatronics Research, Samsung Electronics)
Authors:
Byungjo Kim
(Mechatronics Research, Samsung Electronics)
Seokjun Hong
(Mechatronics Research, Samsung Electronics)
Hyunhak Jeong
(Mechatronics Research, Samsung Electronics)
Suyoung Yoo
(Mechatronics Research, Samsung Electronics)
Seongkeun Cho
(Mechatronics Research, Samsung Electronics)
Sang Ki Nam
(Mechatronics Research, Samsung Electronics)
Yihwan Kim
(Mechatronics Research, Samsung Electronics)
*This work was supported by Mechatronics Research, Samsung Electronics Co., Ltd.
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