Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session DR4: Plasma Semiconductor & RF Applications
1:30 PM–3:30 PM,
Thursday, October 12, 2023
Room: Michigan League, Hussey
Chair: Uwe Czarnetzki, Ruhr-University Bochum, Faculty of Physics and Astronomy
Abstract: DR4.00001 : Reactor-feature coupled model to extend Cu fill in BEOL using PVD
1:30 PM–1:45 PM
Presenter:
Parnika Agrawal
(Applied Materials)
Authors:
Parnika Agrawal
(Applied Materials)
Prashanth Kothnur
(Applied Materials)
Yida Lin
(Applied Materials)
ShaoTing Ho
(Applied Materials)
Xiangjin Xie
(Applied Materials)
Phillip Stout
(Applied Materials)
[1] Simon A., Straten O., Lanzillo N., Yang C., Nogami T. and Edelstein D., J. Vac. Sci. Technol. A 38, 053402 (2020)
[2] Zhang D., Stout P. and Ventzek P., J. Vac. Sci. Technol. A 21(1) 2003
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