Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session DR1: Plasma Surface Interaction I
8:00 AM–9:30 AM,
Thursday, October 12, 2023
Room: Michigan League, Hussey
Chair: Costel Biloiu, Applied Materials Inc
Abstract: DR1.00003 : Probing surface reactivity in plasmas- is it valid to use a constant reaction probability model?*
8:30 AM–9:00 AM
Presenter:
Jean-Paul Booth
(LPP-CNRS)
Authors:
Jean-Paul Booth
(LPP-CNRS)
Olivier Guaitella
(LPP, CNRS, École Polytechnique, Sorbonne Université, Université Paris-Saclay, IP-Paris, Palaiseau, France)
Shu Zhang
(LPP-CNRS)
Dmitry Lopaev
(Lomonosov Moscow State University)
Sergey Zyryanov
(Lomonosov Moscow State University)
Andrey Volynets
(LPP-CNRS)
The surface recombination of oxygen atoms on borosilicate glass tube walls was studied by time-resolved optical emission actinometry of partially modulated DC positive column discharges. The observed reaction probabilities (~10-3) were not constant, but can be explained by Eley-Rideal reaction of incident atoms with chemisorbed atoms with an activation energy provided by the kinetic energy of the incident atom. For full modulation, the atom decay in the afterglow (measured by Cavity Ringdown spectroscopy, CRDS) is non-exponential, starting fast then slowing down. This suggests a second, quadratic, term in the recombination probability which can be attributed to reaction with weakly-bound physisorbed atoms. The presence of small quantities (10-3) of air from vacuum leaks was found to strongly reduce surface recombination, explaining the large variability in oxygen atom density.
CRDS measurements in RF capacitively-coupled plasmas in an aluminium showed surprisingly small surface recombination coefficients (~10-4) at pressures above 2 Torr. At lower pressures the surface reaction probability increases dramatically with RF power, indicating a transition from an oxidized (unreactive) surface to a metallic surface when the ion flux and energy is higher.
*This work was partially supported by Applied Materials Corporation and Federation Plas@par.
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