76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023;
Michigan League, Ann Arbor, Michigan
Session Index
Session GW1: Plasma Diagnostics and Etching
Chair: Jean-Paul Booth, LPP-CNRS
Room: Michigan League, Henderson
Wednesday, October 11, 2023
8:00AM - 8:30AM
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GW1.00001: Probing low temperature plasmas with structured light beams and derivative spectroscopy
Invited Speaker:
Ivan Romadanov
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Wednesday, October 11, 2023
8:30AM - 8:45AM
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GW1.00002: Plasma-based pseudo-wet mechanism for cryogenic SiO2 etching using hydrogen-contained fluorocarbon gases with an in-situ surface analysis
Shih-Nan Hsiao, Makoto Sekine, Takayoshi Tsutsumi, Kenji Ishikawa, Manabu Iwata, Maju Tomura, Yuki Iijima, Taku Gohira, Keiichi Matsushima, Yoshinobu Ohya, Masaru Hori
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Wednesday, October 11, 2023
8:45AM - 9:00AM
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GW1.00003: Automatic Optimization of Reaction Mechanisms in Simulations of High Aspect Ratio Plasma Etching
Florian Krueger, Du Zhang, Pingshan Luan, Minsoek Oh, Minjoon Park, Andrew Metz, Mark Kushner
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Wednesday, October 11, 2023
9:00AM - 9:30AM
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GW1.00004: State-of-the-art plasma etch process and technologies for high aspect ratio pattern
Invited Speaker:
Maju Tomura
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Session GW4: Green Plasma Technologies II
Chair: Thomas Mussenbrock, Bochum University
Room: Michigan League, Henderson
Wednesday, October 11, 2023
1:30PM - 1:45PM
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GW4.00001: Production of Oxygenated Hydrocarbons in Ar Containing Microplasmas
Mackenzie Meyer, Sanjana Kerketta, Ryan Hartman, Mark Kushner
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Wednesday, October 11, 2023
1:45PM - 2:00PM
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GW4.00002: Synthesis of Carbon Nanoparticles from Methane Using a Non-Thermal Plasma
Aishwarya Belamkar, Brandon Wagner, Lorenzo Mangolini
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Wednesday, October 11, 2023
2:00PM - 2:15PM
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GW4.00003: Abatement of Volatile Organic Compounds via a DC Arc Plasma Discharge
Joel A Olson, Ryan Gott, Shayla E Wilhelm, Ray P Pitts, Kenneth Engeling
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Wednesday, October 11, 2023
2:15PM - 2:30PM
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GW4.00004: Abstract Withdrawn
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Wednesday, October 11, 2023
2:30PM - 2:45PM
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GW4.00005: Mass Separation by Electromagnetic Centrifugation in the Continuum Regime<!--EndFragment -->
Drue Hood-McFadden, Harsha Rajesh, Thomas C Underwood
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Wednesday, October 11, 2023
2:45PM - 3:00PM
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GW4.00006: Mass-separation by waves near the cyclotron frequency in the presence of electrostatic self-fields
Amnon Fruchtman, Gennady Makrinich
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Wednesday, October 11, 2023
3:00PM - 3:15PM
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GW4.00007: Investigating the Thermal Effect of Nanosecond Repetitively Pulsed Glow Discharges on a Methane-Air Flame by Coherent Anti-Stokes Raman Scattering and Optical Emission Spectroscopy
Ammar Alkhalifa, Scott A Steinmetz, Christopher J Kliewer, Deanna A Lacoste
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