Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session GW1: Plasma Diagnostics and Etching
8:00 AM–9:30 AM,
Wednesday, October 11, 2023
Room: Michigan League, Henderson
Chair: Jean-Paul Booth, LPP-CNRS
Abstract: GW1.00003 : Automatic Optimization of Reaction Mechanisms in Simulations of High Aspect Ratio Plasma Etching*
8:45 AM–9:00 AM
Presenter:
Florian Krueger
(University of Michigan)
Authors:
Florian Krueger
(University of Michigan)
Du Zhang
(TEL Technology Center, America, LLC)
Pingshan Luan
(TEL Technology Center, America, LLC)
Minsoek Oh
(TEL Technology Center, America, LLC)
Minjoon Park
(TEL Technology Center, America, LLC)
Andrew Metz
(TEL Technology Center, America, LLC)
Mark Kushner
(University of Michigan)
*Work supported by Tokyo Electron America, Samsung Electronics and the National Science Foundation.
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