Tuesday, October 5, 2021
10:15AM - 10:30AM
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DT21.00001: Ion Energy and Density Profile Control by Focus Ring and Associated External Circuit on Capacitively Coupled Plasma
Yuhua Xiao, Joel Brandon, Sang Ki Nam, Kiho Bae, Jang-Yeob Lee, Steven Shannon
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Tuesday, October 5, 2021
10:30AM - 10:45AM
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DT21.00002: Frequency effects on nonlinear harmonic excitations in an asymmetrically-driven capacitive discharge
Jian-Kai Liu, Emi Kawamura, Michael A Lieberman, Allan J Lichtenberg, You-Nian Wang
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Tuesday, October 5, 2021
10:45AM - 11:00AM
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DT21.00003: On the Similarity and Scaling Laws in Low-Pressure Capacitive Radio Frequency Discharges
Yangyang Fu, Bocong Zheng, Huihui Wang, Peng Zhang, Qi Hua Fan, Xinxin Wang, John P. Verboncoeur
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Tuesday, October 5, 2021
11:00AM - 11:30AM
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DT21.00004: 2D PIC simulations of geometrically asymmetric capacitive RF plasmas driven by tailored voltage waveforms
Invited Speaker:
Li Wang
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Tuesday, October 5, 2021
11:30AM - 11:45AM
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DT21.00005: Tuning the Ion Energy Distribution by Tailored Low-frequency Voltage Waveforms in CCPs
Peter Hartmann, Ihor Korolov, Julian Schulze, Wouter van Gennip, Koen Buskes
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Tuesday, October 5, 2021
11:45AM - 12:00PM
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DT21.00006: The effects of surface processes on the plasma parameters in low-pressure multi-frequency capacitive discharges
Aranka Derzsi, Benedek Horvath, Zoltan Donko, Julian Schulze
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Tuesday, October 5, 2021
12:00PM - 12:15PM
Not Participating
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DT21.00007: Structural and Electrical Methods for Enhancing Homogeneity in Intermediate Pressure Capacitively Coupled Plasma Processing Sources
Scott J Doyle, Gregory J Smith, Gregory Daly, Geoff Hassall, James P Dedrick
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Tuesday, October 5, 2021
12:15PM - 12:30PM
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DT21.00008: Electron power absorption in radio frequency driven capacitively coupled chlorine discharge
Jon T Gudmundsson, Andrea Proto, Gardar A Skarphedinsson
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Tuesday, October 5, 2021
10:15AM - 10:45AM
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DT22.00001: Electron kinetics in low temperature plasmas
Invited Speaker:
Vladimir I Kolobov
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Tuesday, October 5, 2021
10:45AM - 11:00AM
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DT22.00002: Dependence of macro-kinetic paraments on the local electric field and mean energy in Nitrogen
Shirshak k Dhali
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Tuesday, October 5, 2021
11:00AM - 11:15AM
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DT22.00003: N2(A3Σu+,v) Energy Transfer Kinetics in Reacting N2-CO2-CH4 Plasmas
David K Mignogna, Elijah R Jans, Sai Raskar, Igor V Adamovich
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Tuesday, October 5, 2021
11:15AM - 11:30AM
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DT22.00004: Time-resolved CO2, CO, and N2 Vibrational Populations in In Ns Pulse Discharge Plasmas
Caleb Richards, Elijah R Jans, Igor V Adamovich
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Tuesday, October 5, 2021
11:30AM - 11:45AM
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DT22.00005: Kinetics of Atomic and Metastable Species in N2 and H2-N2 Ns Pulse Discharges
Xin Yang, Caleb Richards, Elijah R Jans, Sai Raskar, Dirk van den Bekerom, Igor V Adamovich
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Tuesday, October 5, 2021
11:45AM - 12:00PM
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DT22.00006: The case for CO2 decomposition in plasma through vibrational activation: a closer look at the vibrational kinetics in a high excitation regime
Ana F Sovelas da Silva, Qin Ong, Alex W van de Steeg, Vasco Guerra, Gerard J Van Rooij
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Tuesday, October 5, 2021
12:00PM - 12:15PM
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DT22.00007: Kinetic Mechanisms in CO2-N2 Plasmas
Chloé Fromentin, Tiago Silva, Tiago C Dias, Edmond Baratte, Olivier Guaitella, Omar Biondo, Vasco Guerra
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Tuesday, October 5, 2021
10:15AM - 10:30AM
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DT24.00001: 2D Modeling of Dynamic Contraction in Chemically Reactive Non-equilibrium Plasma Flow
Hongtao Zhong, Xingqian Mao, Mikhail Shneider, Yiguang Ju
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Tuesday, October 5, 2021
10:30AM - 10:45AM
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DT24.00002: Chemical Model Reduction for Negative Hydrogen Ion Density Predictions Using Global Sensitivity Analysis
Simone Venturi, Tiernan Casey, Wei Yang, Igor Kaganovich
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Tuesday, October 5, 2021
10:45AM - 11:00AM
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DT24.00003: Refined Optimization of a Uranium Oxide Reaction Mechanism Using Plasma Flow Reactor Measurements
Mikhail S Finko, Davide Curreli, Batikan Koroglu, Kate E Rodriguez, Timothy P Rose, Harry B Radousky, Kim Knight
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Tuesday, October 5, 2021
11:00AM - 11:15AM
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DT24.00004: Investigation of CO2 Conversion in a High-Power Inductively Coupled Plasma Source by Global Modeling
Hendrik Burghaus, Sebastian Wilczek, Thomas Mussenbrock, Stefanos Fasoulas, Georg Herdrich
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Tuesday, October 5, 2021
11:15AM - 11:30AM
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DT24.00005: CO2 dissociation in a microwave plasma torch: efficiency evaluation and comparison with other plasma sources
Natalia Y Babaeva, George V Naidis, Dmitry V Tereshonok, Timofey V Chernishev, Luka S Volkov, Sebastian Wilczek, Yue Liu, Thomas Mussenbrock
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Tuesday, October 5, 2021
11:30AM - 11:45AM
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DT24.00006: The influence of key vibrational states on plasma modelling
Sebastian Mohr, Harindranath Ambalampitiya, Martin Hanicinec, He Su, Jonathan Tennyson
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Tuesday, October 5, 2021
11:45AM - 12:00PM
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DT24.00007: Two dimensional simulations of the vibrational state distributions in low pressure hydrogen plasmas with an isothermal neutral gas and gas temperature gradients
Gregory J Smith, Paola Diomede, Andrew Gibson, Scott J Doyle, Vasco Guerra, Mark J Kushner, Timo Gans, James P Dedrick
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Tuesday, October 5, 2021
12:00PM - 12:15PM
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DT24.00008: Student Excellence Award Finalist: Insight into chemistry and transport in CO2 microwave discharges through comparisons between simulations and experiments
Luca Vialetto, Pedro Viegas, Alex W van de Steeg, Gerard J Van Rooij, Savino Longo, Jan Van Dijk, Paola Diomede
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