Bulletin of the American Physical Society
74th Annual Gaseous Electronics Conference
Volume 66, Number 7
Monday–Friday, October 4–8, 2021;
Virtual: GEC Platform
Time Zone: Central Daylight Time, USA
Session DT24: Modeling of Plasma Chemistry
10:15 AM–12:15 PM,
Tuesday, October 5, 2021
Virtual
Room: GEC platform
Chair: Xiaopu Li, Applied Materials Inc
Abstract: DT24.00004 : Investigation of CO2 Conversion in a High-Power Inductively Coupled Plasma Source by Global Modeling*
11:00 AM–11:15 AM
Presenter:
Hendrik Burghaus
(Institute of Space Systems, University of Stuttgart)
Authors:
Hendrik Burghaus
(Institute of Space Systems, University of Stuttgart)
Sebastian Wilczek
(Ruhr University Bochum)
Thomas Mussenbrock
(Ruhr University Bochum)
Stefanos Fasoulas
(Institute of Space Systems, University of Stuttgart)
Georg Herdrich
(Institute of Space Systems, University of Stuttgart)
*The authors want to express their gratitude to the German Academic Scholarship Foundation (Studienstiftung des Deutschen Volkes), the Friedrich und Elisabeth Boysen-Stiftung and the German Research Foundation (Project No. 445072286) for the financial support of this work.
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