Bulletin of the American Physical Society
74th Annual Gaseous Electronics Conference
Volume 66, Number 7
Monday–Friday, October 4–8, 2021;
Virtual: GEC Platform
Time Zone: Central Daylight Time, USA
Session DT21: Capacitively Coupled Plasmas I
10:15 AM–12:30 PM,
Tuesday, October 5, 2021
Virtual
Room: GEC platform
Chair: Shahid Rauf, Applied Materials
Abstract: DT21.00002 : Frequency effects on nonlinear harmonic excitations in an asymmetrically-driven capacitive discharge*
10:30 AM–10:45 AM
Presenter:
Jian-Kai Liu
(Dalian University of Technology; University of California, Berkeley)
Authors:
Jian-Kai Liu
(Dalian University of Technology; University of California, Berkeley)
Emi Kawamura
(University of California, Berkeley)
Michael A Lieberman
(University of California, Berkeley)
Allan J Lichtenberg
(University of California, Berkeley)
You-Nian Wang
(Dalian University of Technology)
*This work was partially supported by a gift from Applied Materials Corporation, AKT Display Group. This work was also supported by the National Natural Science Foundation of China (NSFC) (Grant No. 11935005). The author Jian-Kai Liu also appreciates the support provided by the China Scholarship Council.
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