Bulletin of the American Physical Society

73rd Annual Gaseous Electronics Virtual Conference

Volume 65, Number 10

Monday–Friday, October 5–9, 2020; Time Zone: Central Daylight Time, USA.

Session Index

Session XF1: Perspective in Current Trends and Future of Plasma Science II

Chair: Kentaro Hara, Stanford University

Friday, October 9, 2020 9:45AM - 10:15AM Live		XF1.00001: Atomic and Molecular Collision Data for Plasma Science Invited Speaker: Klaus Bartschat Preview Abstract
Friday, October 9, 2020 10:15AM - 10:45AM Live		XF1.00002: Plasmas and Trap Based Beams as Drivers for New Science with Antimatter Invited Speaker: Clifford M. Surko Preview Abstract
Friday, October 9, 2020 10:45AM - 11:15AM Live		XF1.00003: A Vision for Non-Equilibrium Plasma Science and Applications Invited Speaker: David Graves Preview Abstract

Session XF2: Diagnostics III: Optical Diagnostics

Chair: Matthew Goeckner, University of Texas, Dallas

Friday, October 9, 2020 9:45AM - 10:00AM Live		XF2.00001: Towards Single Shot Plasma Diagnostics Stephan Reuter, Benjamin M. Goldberg, Luka Hansen, Arthur Dogariu, Richard B. Miles Preview Abstract
Friday, October 9, 2020 10:00AM - 10:15AM Live		XF2.00002: In -situ Raman thermometry as a tool to study Low temperature plasma -- material surface interactions Carla Berrospe Rodriguez, Joseph Schwan, Lorenzo Mangolini Preview Abstract
Friday, October 9, 2020 10:15AM - 10:30AM Live		XF2.00003: Machine learning and optical emission spectroscopy Tahereh Mansouri, Paul Maguire Preview Abstract
Friday, October 9, 2020 10:30AM - 10:45AM Live		XF2.00004: Development of low-pressure oxygen discharge emission model for electron temperature determination Jessica Pachicano, John B. Boffard, Chun C. Lin, Amy Wendt Preview Abstract
Friday, October 9, 2020 10:45AM - 11:00AM Live		XF2.00005: Mass spectrometric study of O, O$_{\mathrm{2}}(a^{\mathrm{1}}\Delta _{\mathrm{g}})$ and O$_{\mathrm{3}}$ in time-modulated RF driven atmospheric pressure plasma jets Jingkai Jiang, Yolanda Aranda Gonzalvo, Peter Bruggeman Preview Abstract
Friday, October 9, 2020 11:00AM - 11:15AM Live		XF2.00006: SPRIGHT -- Small Plasma Reflection Interrogation by GHz Transmitter Andrei Khomenko, Sergey Macheret Preview Abstract
Friday, October 9, 2020 11:15AM - 11:30AM Live		XF2.00007: Velocity Map Imaging for Electron Energy Distribution Measurements in REMPI-initiated Plasma Jonathan Frank, David Chandler, Martin Fournier, Eric Smoll Preview Abstract
Friday, October 9, 2020 11:30AM - 11:45AM Live		XF2.00008: The Effect of Decoherence on Microwave Scattering from a Small Expanding Laser-Generated Plasma Christopher Galea, Mikhail Shneider, Arthur Dogariu, Richard Miles Preview Abstract
Friday, October 9, 2020 11:45AM - 12:00PM On Demand		XF2.00009: Characteristics of an energy selective mass spectrometer with a Bessel-Box type energy filter Christian Schulze, Zoltan Donko, Jan Benedikt Preview Abstract

Session XF3: Plasma Etching

Chair: Wei Tian, Taiwan Semiconductor Manufacturing Corporation

Friday, October 9, 2020 9:45AM - 10:15AM Live		XF3.00001: Advancements in Feature Scale Simulations Invited Speaker: Paul Moroz Preview Abstract
Friday, October 9, 2020 10:15AM - 10:30AM Live		XF3.00002: Optimization of Etching Recipes for Si Trenches with Self-Aligned Quadruple Patterning Mask by Transfer Learning Naoto Takano, Hyakka Nakada, Takeshi Omori Preview Abstract
Friday, October 9, 2020 10:30AM - 10:45AM Live		XF3.00003: Quantum Tunneling with Space Charge Effects in Thin Insulating Gaps. Sneha Banerjee, Peng Zhang Preview Abstract
Friday, October 9, 2020 10:45AM - 11:15AM Live		XF3.00004: Dynamics of physicochemical reactions in time-modulation of plasmas for advanced semiconductor processes Invited Speaker: Masaru Hori Preview Abstract

Session XF4: Atmospheric Plasma Material Treatment and Synthesis I

Chair: Carles Corbella, George Washington

Friday, October 9, 2020 9:45AM - 10:00AM Live		XF4.00001: Synthesis of graphene quantum dots by DC atmospheric pressure microplasma jets: the influence of polarity Thomas Orriere, David Pai, Darwin Kurniawan, Yi-Chen Chang, Wei-Hung Chiang Preview Abstract
Friday, October 9, 2020 10:00AM - 10:15AM Live		XF4.00002: Atmospheric pressure plasma surface functionalization of polystyrene Jordyn Polito, Mark Denning, Richard Stewart, David Frost, Mark J. Kushner Preview Abstract
Friday, October 9, 2020 10:15AM - 10:30AM Live		XF4.00003: Atmospheric Pressure Low Temperature Plasma Jet Sintering of Silver Nanoparticles Nazli Turan, Mortaza Saeidi-Javash, Yanliang Zhang, David Go Preview Abstract
Friday, October 9, 2020 10:30AM - 10:45AM Live		XF4.00004: Surface treatment of TiO$_{\mathrm{2}}$ nano-powder using dielectric barrier discharges with rotatable electrodes Naw Rutha Paw, Takuma Kimura, Tatsuo Ishijima, Yasunori Tanaka, Yusuke Nakano, Yoshihiko Uesugi, Shiori Sueyasu, Shu Watanabe, Keitaro Nakamura Preview Abstract
Friday, October 9, 2020 10:45AM - 11:00AM Live		XF4.00005: Direct Writing of Copper Using an FE-DBD Jet for Epidermal Electronics Matthew Burnette, David Staack Preview Abstract
Friday, October 9, 2020 11:00AM - 11:15AM Live		XF4.00006: Generation of solids from carbon monoxide gas using microplasma discharge Sanil John, Ashley Leibham Preview Abstract
Friday, October 9, 2020 11:15AM - 11:45AM Live		XF4.00007: Integrated Modeling of Carbon and Boron Nitride Nanotubes Synthesis in Plasma of High-Pressure Arc. Invited Speaker: Igor Kaganovich Preview Abstract
Friday, October 9, 2020 11:45AM - 12:00PM Live		XF4.00008: Atmospheric Pressure Plasma Treatment of Porous Dielectrics Kseniia Konina, Juliusz Kruszelnicki, Mark J. Kushner Preview Abstract

Session XF5: Women In Plasma Science

Chair: Svetlana Radovanov, Applied Materials

Friday, October 9, 2020
11:45AM - 12:30PM

XF5.00001: Women In Science

Preview Abstract

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