Bulletin of the American Physical Society

64th Annual Gaseous Electronics Conference

Volume 56, Number 15

Monday–Friday, November 14–18, 2011; Salt Lake City, Utah

Session Index

Session NR1: Plasma Etching

Chair: Kouichi Ono, Kyoto University
Room: 255D

Thursday, November 17, 2011 9:30AM - 10:00AM		NR1.00001: Mechanism of Si and metal etching based on sticking reaction model Invited Speaker: Preview Abstract
Thursday, November 17, 2011 10:00AM - 10:15AM		NR1.00002: Noninvasive sheath diagnostics in an inductively coupled plasma using a remote RF sensor Satoru Kobayashi, Shahid Rauf, ken Collins Preview Abstract
Thursday, November 17, 2011 10:15AM - 10:30AM		NR1.00003: Mechanism for Plasma Etching of Shallow Trench Isolation Features in an Inductively Coupled Plasma Ankur Agarwal, Shahid Rauf, Jim He, Jinhan Choi, Ken Collins Preview Abstract
Thursday, November 17, 2011 10:30AM - 10:45AM		NR1.00004: Deposition Step in MEMS Time Multiplexed Etch Lawrence Overzet, Iqbal Saraf, Matthew Goeckner Preview Abstract
Thursday, November 17, 2011 10:45AM - 11:00AM		NR1.00005: Study on modification process of photoresist by fluorocarbon ions and radicals Takuya Takeuchi, Shinpei Amasaki, Keigo Takeda, Kenji Ishikawa, Hiroki Kondo, Makoto Sekine, Masaru Hori Preview Abstract
Thursday, November 17, 2011 11:00AM - 11:15AM		NR1.00006: Mechanism of Highly Selective SiO$_{2}$ Etching over Si using New Alternative Gas, C$_{5}$HF$_{7}$ Yudai Miyawaki, Keigo Takeda, Hiroki Kondo, Kenji Ishikawa, Makoto Sekine, Masaru Hori, Atsuyo Yamazaki, Azumi Ito, Hirokazu Matsumoto Preview Abstract
Thursday, November 17, 2011 11:15AM - 11:30AM		NR1.00007: Exploring High AR 2$\mu $m TSV (25:1) Maarten Kostermans, Ulrich Baier, Werner Boullart, Mohand Brouri, Johan Vertommen, Arnaud Pageau Preview Abstract
Thursday, November 17, 2011 11:30AM - 11:45AM		NR1.00008: 2D etch rate uniformity improvement in a parallel turn ICP system: numerical modeling and experiment Junghoon Joo Preview Abstract
Thursday, November 17, 2011 11:45AM - 12:00PM		NR1.00009: Simulation study of SF6 plasma etching in the GEC reference cell Sergio Lopez-Lopez, Brent Walker, James Munro, Jonathan Tennyson Preview Abstract
Thursday, November 17, 2011 12:00PM - 12:15PM		NR1.00010: Fourier Transform Infrared Absorption Spectroscopy of Gas-Phase and Surface Reaction Products during Si Etching in Inductively Coupled Cl$_{2}$ Plasmas Hiroki Miyata, Hirotaka Tsuda, Daisuke Fukushima, Yoshinori Takao, Koji Eriguchi, Kouichi Ono Preview Abstract
Thursday, November 17, 2011 12:15PM - 12:30PM		NR1.00011: Molecular Dynamics Analysis of Ion Incident Energy and Angle Dependences of Si etching with Cl, Br, and HBr beams Nobuya Nakazaki, Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, Kouichi Ono Preview Abstract

Session NR2: Electron-Impact Ionization of Atoms and Molecules

Chair: Murthada Khakoo, California State University - Fullerton
Room: 255E

Thursday, November 17, 2011 9:30AM - 10:00AM		NR2.00001: Theoretical and experimental (e,2e) studies for isoelectronic atoms and molecules -- Ne and CH4 Invited Speaker: Preview Abstract
Thursday, November 17, 2011 10:00AM - 10:15AM		NR2.00002: A relativistic treatment of electron ionization of xenon Allan Stauffer, Alexey Illarionov Preview Abstract
Thursday, November 17, 2011 10:15AM - 10:30AM		NR2.00003: Indistinguishability in Excitation-Ionization B. Milum, A.L. Harris, D.H. Madison Preview Abstract
Thursday, November 17, 2011 10:30AM - 10:45AM		NR2.00004: Using generalized Sturmian basis for two- and three-body scattering problems Ancarani Lorenzo Ugo, Gasaneo Gustavo Preview Abstract
Thursday, November 17, 2011 10:45AM - 11:00AM		NR2.00005: Calculating electron-impact ionization cross sections for molecules without making orientation averaging approximation Adam Upshaw, Don Madison Preview Abstract
Thursday, November 17, 2011 11:00AM - 11:30AM		NR2.00006: (e,2e) Experiments on Small Noble Gas Clusters: Search for Multicenter and Interference Effects Invited Speaker: Preview Abstract
Thursday, November 17, 2011 11:30AM - 11:45AM		NR2.00007: Experimental and theoretical triple differential cross sections for electron impact ionization of aligned H$_{2}$ Esam Ali, Allison Harris, Julian Lower, Erich Weigold, Chuangang Ning, Don Madison Preview Abstract
Thursday, November 17, 2011 11:45AM - 12:00PM		NR2.00008: Theoretical and Experimental Triple Differential Cross Sections for Electron Impact Ionization of Neon S.M. Amami, Don Madison, Thomas Pflueger, Xueguang Ren, Arne Senftleben, Alexander Dorn, Joachim Ullrich Preview Abstract
Thursday, November 17, 2011 12:00PM - 12:15PM		NR2.00009: Fully Nonperturbative Treatment of Ionization and Ionization with Excitation of Noble Gases Oleg Zatsarinny, Klaus Bartschat Preview Abstract
Thursday, November 17, 2011 12:15PM - 12:30PM		NR2.00010: On the applicability of the Exterior Complex Scaling method for scattering problems including Coulombic potentials Ancarani Lorenzo Ugo, Gasaneo Gustavo, Mitnik Dario Preview Abstract

Session NR3: High Pressure Discharges II

Chair: Walter Lempert, Ohio State University
Room: 255F

Thursday, November 17, 2011 9:30AM - 10:00AM		NR3.00001: Spectroscopic diagnostics of high density plasmas Invited Speaker: Preview Abstract
Thursday, November 17, 2011 10:00AM - 10:15AM		NR3.00002: High-frequency AC breakdown in near-atmospheric pressure noble gasses Ana Sobota, J.H.M. Kanters, M.F. Gendre, F. Manders, J. van Dijk, E.M. van Veldhuizen, M. Haverlag Preview Abstract
Thursday, November 17, 2011 10:15AM - 10:30AM		NR3.00003: Control of excited species radial distribution through gas admixtures in an atmospheric plasma jet Robert Leiweke, Sarah Taylor, Biswa Ganguly Preview Abstract
Thursday, November 17, 2011 10:30AM - 10:45AM		NR3.00004: Correlation of streamer current pulses associated with adjacent high voltage needles in atmospheric pressure cold plasma reactors Erik Wemlinger, Patrick Pedrow Preview Abstract
Thursday, November 17, 2011 10:45AM - 11:00AM		NR3.00005: Investigation of breakdown processes in automotive HID lamps Andre Bergner, Thomas Hoebing, Cornelia Ruhrmann, Juergen Mentel, Peter Awakowicz Preview Abstract
Thursday, November 17, 2011 11:00AM - 11:15AM		NR3.00006: Control of Ion Activation Energy to Surfaces in Atmospheric Pressure Plasmas Using Porous Dielectrics Films Natalia Yu. Babaeva, Mark J. Kushner Preview Abstract
Thursday, November 17, 2011 11:15AM - 11:30AM		NR3.00007: Towards a quantitative model for streamer coronas Ute Ebert Preview Abstract
Thursday, November 17, 2011 11:30AM - 11:45AM		NR3.00008: Simulation of High Pressure Ionization Waves in Straight and Circuitous Dielectric Channels Zhongmin Xiong, Keisuke Takashima, Igor V. Adamovich, Mark J. Kushner Preview Abstract
Thursday, November 17, 2011 11:45AM - 12:00PM		NR3.00009: Particle-in-Cell Simulation for the Control of Electron Energy Distribution of Dielectric Barrier Discharges at Atmospheric Pressure Hyo Won Bae, Jung Yel Lee, Ho-Jun Lee, Hae June Lee Preview Abstract
Thursday, November 17, 2011 12:00PM - 12:15PM		NR3.00010: Modeling the generation and propagation of plasma jets J.P. Boeuf, L. Yang, M. Foletto, L.C. Pitchford, L. Joly Preview Abstract
Thursday, November 17, 2011 12:15PM - 12:30PM		NR3.00011: Investigation of metastable production in a closed-cell dielectric capillary variable pressure He plasma jet with Ar admixture Brian Sands, Biswa Ganguly Preview Abstract

About APS

The American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics.

Headquarters 1 Physics Ellipse, College Park, MD 20740-3844 (301) 209-3200
Editorial Office 100 Motor Pkwy, Suite 110, Hauppauge, NY 11788 (631) 591-4000
Office of Public Affairs 529 14th St NW, Suite 1050, Washington, D.C. 20045-2001 (202) 662-8700

Bulletin of the American Physical Society

64th Annual Gaseous Electronics Conference

Volume 56, Number 15

Monday–Friday, November 14–18, 2011; Salt Lake City, Utah

Session Index

Session NR1: Plasma Etching

Session NR2: Electron-Impact Ionization of Atoms and Molecules

Session NR3: High Pressure Discharges II

Follow Us

Engage

My APS

Information for

About APS