Bulletin of the American Physical Society
64th Annual Gaseous Electronics Conference
Volume 56, Number 15
Monday–Friday, November 14–18, 2011; Salt Lake City, Utah
Session NR1: Plasma Etching
9:30 AM–12:30 PM,
Thursday, November 17, 2011
Room: 255D
Chair: Kouichi Ono, Kyoto University
Abstract ID: BAPS.2011.GEC.NR1.9
Abstract: NR1.00009 : Simulation study of SF6 plasma etching in the GEC reference cell
11:45 AM–12:00 PM
Preview Abstract
Abstract
Authors:
Sergio Lopez-Lopez
(University College London and Quantemol Ltd.)
Brent Walker
(University College London and Quantemol Ltd.)
James Munro
(University College London and Quantemol Ltd.)
Jonathan Tennyson
(University College London and Quantemol Ltd.)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2011.GEC.NR1.9
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