Bulletin of the American Physical Society
64th Annual Gaseous Electronics Conference
Volume 56, Number 15
Monday–Friday, November 14–18, 2011; Salt Lake City, Utah
Session NR1: Plasma Etching
9:30 AM–12:30 PM,
Thursday, November 17, 2011
Room: 255D
Chair: Kouichi Ono, Kyoto University
Abstract ID: BAPS.2011.GEC.NR1.7
Abstract: NR1.00007 : Exploring High AR 2$\mu $m TSV (25:1)
11:15 AM–11:30 AM
Preview Abstract
Abstract
Authors:
Maarten Kostermans
(imec)
Ulrich Baier
(imec)
Werner Boullart
(imec)
Mohand Brouri
(Lam)
Johan Vertommen
(Lam)
Arnaud Pageau
(Polytech Orleans)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2011.GEC.NR1.7
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