63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Volume 55, Number 7
Monday–Friday, October 4–8, 2010;
Paris, France
Session Index
Session NR2: Plasma Surface Interactions II
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Chair: Hirotaka Toyoda, Nagoya University
Room: 162
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Thursday, October 7, 2010
10:30AM - 11:00AM
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NR2.00001: Heterogeneous Reactions in Processing Plasmas
Invited Speaker:
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Thursday, October 7, 2010
11:00AM - 11:15AM
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NR2.00002: Reactivity of atoms adsorbed on catalytic surfaces under plasma exposure
Daniil Marinov, Olivier Guaitella, Antoine Rousseau, Marko Huebner, Jurgen Roepcke, Vasco Guerra, Carlos Pintassilgo
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Thursday, October 7, 2010
11:15AM - 11:30AM
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NR2.00003: Plasma-Modification of Mineral Surfaces for Optimizing Froth-Flotation
Frank May, Volker Br\"{u}ser, Antje Quade, Christian Walter
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Thursday, October 7, 2010
11:30AM - 11:45AM
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NR2.00004: Mechanism of Si Oxidation in H$_{2}$/O$_{2}$/Ar Surface Wave Plasma
Keigo Takeda, Masaru Hori
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Thursday, October 7, 2010
11:45AM - 12:00PM
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NR2.00005: On plasma based species deposition at a Pyrex surface studied by post plasma N$_{x}$O$_{y}$ conversion
J. Roepcke, M. Huebner, D. Marinov, O. Guaitella, A. Rousseau, C.D. Pintassilgo, V. Guerra
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Thursday, October 7, 2010
12:00PM - 12:15PM
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NR2.00006: Energy influxes at the substrate in magnetron sputtering processes
Pierre-Antoine Cormier, Anne-Lise Thomann, Nadjib Semmar, R\'emi Dussart, Jacky Mathias, Adil Balhamri, Stephanos Konstadinidis, Rony Snyders, Olivier Antonin, Caroline Boisse-Laporte, Tiberiu Minea
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Thursday, October 7, 2010
12:15PM - 12:30PM
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NR2.00007: Angular distribution of sputtered platinum particles during argon plasma etching
Pierre-Marc Berube, Joelle Margot, Sebastien Delprat, Mohamed Chaker, Luc Stafford
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