Bulletin of the American Physical Society
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Volume 55, Number 7
Monday–Friday, October 4–8, 2010; Paris, France
Invited Speakers
Allan, Michael University of Fribourg |
Session LW3.00002 Measuring accurate electron-molecule cross-sections for Plasma simulation Room: Petit Amphitheatre |
Boffard, John B. University of Wisconsin-Madison |
Session PR2.00001 Optical Diagnostics using Spectroscopic Measurements of Argon Room: 162 |
Bravenec, Ron Fourth State Research and Tokyo Electron America |
Session SF4.00001 Simulations of plasma formation and sustainment in an RLSA (radial-line slot antenna) microwave plasma source Room: 162 |
Brinkmann, Ralf Peter Ruhr-University Bochum |
Session NR1.00001 The Multipole Resonance Probe -- Concept, Theory, Experiments Room: 151 |
Cassimi, A. CIMAP/CIRIL |
Session QR3.00001 Collision induced water fragmentation: multiple ionisation and isotopic effects Room: Petit Amphitheatre |
Chang, Hong-Young Department of Physics, Korea Advanced Institute of Science and Technology |
Session NR1.00005 Wave-Cutoff Method with High Time Resolution Room: 151 |
Colgan, James LANL |
Session UF2.00003 Differential cross sections for ion-impact ionization of helium Room: 262 |
Cvelbar, Uros Jozef Stefan Institute |
Session ET4.00001 Blood-biocompatible materials via plasma processing Room: Petit Amphitheatre |
Di Mundo, Rosa University of Bari |
Session BT2.00001 Nanotextured polymers by plasma etching: defining chemistry and topography for superior wetting and optics Room: 151 |
Donko, Zoltan Research Institute for Solid State Physics and Optics, Hungarian Academy of Sciences, Budapest, Hungary |
Session VF1.00001 Progress on simulations of multiple-frequency capacitively coupled discharges Room: 151 |
Donnelly, Vincent University of Houston |
Session NR2.00001 Heterogeneous Reactions in Processing Plasmas Room: 162 |
Ferguson, Eldon University of Colorado, Boulder |
Session FT.00002 Ion Molecule Collision Processes in Gaseous Electronics Room: 151 |
Fruchtman, Amnon H.I.T. - Holon Institute of Technology |
Session BT3.00001 The effect of neutral-gas depletion on the plasma density and momentum Room: 262 |
Fursa, Dmitry Curtin University |
Session NR3.00001 Calculation of excitation and ionization processes using relativistic CCC method Room: Petit Amphitheatre |
Gorfinkiel, Jimena The Open University |
Session BT4.00001 Low energy electron collisions of relevance to biological radiation damage Room: Petit Amphitheatre |
Han, Jeon G. Sungkyunkwan University |
Session FT.00003 Current Issues for next generation large area and high rate plasma process for thin film deposition Room: 151 |
Hatakeyama, Rikizo Department of Electronic Engineering, Tohoku University |
Session GW.00002 Plasma Processing Power for Nanocarbon Nanobioelectronics Room: Grand Amphitheatre |
Hayashi, H. Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan |
Session QR2.00004 Fine ion energy control for sub-32 nm node device RIE using pulsed-DC superimposed 100 MHz rf CCP Room: 151 |
Hebner, Greg Sandia National Laboratories |
Session TF4.00001 Increasing understanding of the plasma-surface boundary layer and surface chemistry using optical sum frequency generation diagnostic tools Room: 151 |
Iza, Felipe Loughborough University |
Session ET1.00001 Experimental and computational characterization of He+H$_2$O plasmas at atmospheric pressure Room: 162 |
Joubert, Olivier CNRS |
Session BT1.00001 Synchronized pulsed plasmas: potential process improvements for patterning technologies Room: 162 |
Kawamura, Emi University of California, Berkeley |
Session PR1.00001 2D Hybrid Fluid-Analytical Model of Inductive/Capacitive Plasma Discharges Room: 151 |
Kobayashi, Hiroyuki Central Research Laboratory, Hitachi, Ltd. |
Session VF3.00004 Behavior of particles in plasma etching apparatus Room: 262 |
Kroesen, Gerrit Eindhoven University of Technology |
Session SF1.00001 Discharge lamps: current challenges, perspectives and threats Room: Petit Amphitheatre |
Kroll, Ulrich Oerlikon Solar-Lab, Rue du Puits-Godet 12a, CH-2000 Neuch\^atel |
Session GW.00001 Thin Film Silicon Solar Cells and Modules Deposited by PECVD: From R{\&}D Lab Developments to Large-Area Production Tools Room: Grand Amphitheatre |
Kushner, Mark J. University of Michigan, Ann Arbor, MI USA |
Session HW.00001 The Role of Modeling in Developing New Plasma Technologies: Microelectronics to Plasma Medicine and Liquids Room: Grand Amphitheatre |
LaForge, Aaron Missouri S\&T Physics dept. |
Session UF2.00001 Doubly differential spectra of scattered protons in ionization of atomic hydrogen Room: 262 |
Lee, Jae Koo Pohang University |
Session BT4.00002 Plasma Biomedicine: Modelings and Experiments on Cancer Treatment, Tooth Bleaching, and Decontamination Room: Petit Amphitheatre |
Lieberman, Michael UC Berkeley |
Session FT.00001 Plasma Processing for Nanoelectronics --- History and Prospects Room: 151 |
Mazouffre, St\'ephane ICARE - CNRS |
Session VF4.00001 Ion and atom flow in a Hall discharge: Impact of operating parameters Room: 162 |
Mueller, Alfred Giessen University |
Session SF2.00001 Electron-ion collisions: precision spectroscopy and plasma rate coefficients Room: 262 |
Nixon, Kate University of Manchester |
Session NR3.00004 Electron Impact Ionisation of Molecules Room: Petit Amphitheatre |
O'Connell, Deborah Centre for Plasma Physics, Queens University Belfast, UK |
Session LW2.00001 Interactions of multiple atmospheric pressure plasma jets and DNA Room: 151 |
Ono, Kouichi Kyoto University |
Session QR2.00001 Plasma-surface interactions in plasma etching processes for nanometer-scale microelectronic devices Room: 151 |
Petrovic, Zoran Institute of Physics Belgrade |
Session LW3.00001 Gaseous positronics: collisions and transport of positrons in gases Room: Petit Amphitheatre |
Sankaran, R. Mohan Case Western Reserve University |
Session MR1.00001 Bottom-up approaches to plasma synthesis of nanomaterials Room: 162 |
Shiratani, Masaharu Kyushu University |
Session FT.00004 Academic Roadmap of Plasma Process Technologies Room: 151 |
Starikovskaia, Svetlana LPP Ecole Polytechnique, France |
Session UF1.00001 Physics and chemistry of nanosecond pulsed discharges Room: Petit Amphitheatre |
Viggiano, Albert Air Force Research Laboratory |
Session QR3.00003 Teaching an old dog new tricks: Using the Flowing Afterglow Langmuir Probe apparatus to measure electron attachment to radicals and ion-ion neutralization Room: Petit Amphitheatre |
Yamazawa, Yohei Tokyo Electron AT LTD. |
Session VF1.00004 Electrode Impedance Effect in a CCP reactor Room: 151 |
Yasutake, Kiyoshi Osaka University |
Session VF2.00001 Purified Si Film Formation from Metallurgical-Grade Si by Hydrogen Plasma Induced Chemical Transport Room: Petit Amphitheatre |
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