Bulletin of the American Physical Society
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Volume 55, Number 7
Monday–Friday, October 4–8, 2010; Paris, France
Session NR2: Plasma Surface Interactions II
10:30 AM–12:30 PM,
Thursday, October 7, 2010
Room: 162
Chair: Hirotaka Toyoda, Nagoya University
Abstract ID: BAPS.2010.GEC.NR2.5
Abstract: NR2.00005 : On plasma based species deposition at a Pyrex surface studied by post plasma N$_{x}$O$_{y}$ conversion
11:45 AM–12:00 PM
Preview Abstract Abstract
Authors:
J. Roepcke
(INP-Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald)
M. Huebner
(INP-Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany)
D. Marinov
(LPP, Ecole Polytechnique, UPMC, Universite Paris Sud-11, CNRS, Palaiseau, France)
O. Guaitella
(LPP, Ecole Polytechnique, UPMC, Universite Paris Sud-11, CNRS, Palaiseau, France)
A. Rousseau
(LPP, Ecole Polytechnique, UPMC, Universite Paris Sud-11, CNRS, Palaiseau, France)
C.D. Pintassilgo
(IPFN-Laboratorio Associado, IST, 1049-001 Lisboa, Portugal)
V. Guerra
(Instituto de Plasmas e Fusao Nuclear - Laboratorio Associado, Instituto Superior Tecnico, 1049-001 Lisboa, Portugal)
Collaborations:
INP-Greifswald, LPP, Ecole Polytechnique, Instituto de Plasmas e Fusao Nuclear, Faculdade de Engenharia
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2010.GEC.NR2.5
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