Bulletin of the American Physical Society
63rd Annual Gaseous Electronics Conference and 7th International Conference on Reactive Plasmas
Volume 55, Number 7
Monday–Friday, October 4–8, 2010; Paris, France
Session NR2: Plasma Surface Interactions II
10:30 AM–12:30 PM,
Thursday, October 7, 2010
Room: 162
Chair: Hirotaka Toyoda, Nagoya University
Abstract ID: BAPS.2010.GEC.NR2.7
Abstract: NR2.00007 : Angular distribution of sputtered platinum particles during argon plasma etching
12:15 PM–12:30 PM
Preview Abstract Abstract
Authors:
Pierre-Marc Berube
(Universite de Montreal)
Joelle Margot
(Universite de Montreal)
Sebastien Delprat
(INRS-EMT)
Mohamed Chaker
(INRS-EMT)
Luc Stafford
(Universite de Montreal)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2010.GEC.NR2.7
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