CMOS-Integrated Diamond Nitrogen-Vacancy Quantum Sensor*

We report the first on-chip quantum sensor which combines CMOS integrated circuit technologies with nitrogen-vacancy (NV) centers in diamond. We will discuss how this system performs two critical functions for quantum magnetometry with NV centers: strong generation and efficient delivery of microwave for quantum-state control, and optical filtering/detection of spin-dependent fluorescence for quantum-state readout. We demonstrate on-chip optically detectable magnetic resonance (ODMR) for the first time. I will then discuss, some of our more recent efforts toward increasing the capabilities of this system to coherently control the NV's spin state.