Tuesday, March 14, 2017 
2:30PM - 2:42PM 
 
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H28.00001: Fabrication of Quench Condensed Thin Films Using an Integrated MEMS Fab on a Chip 
Richard Lally, Jeremy Reeves, Thomas Stark, Lawrence Barrett, David Bishop
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Tuesday, March 14, 2017 
2:42PM - 2:54PM 
 
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H28.00002: A MEMS Based Stencil Lithography Approach to Nanomanufacturing 
Lawrence Barrett, Thomas Stark, Jeremy Reeves, Richard Lally, David Bishop
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Tuesday, March 14, 2017 
2:54PM - 3:06PM 
 
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H28.00003: Wide actuation range cavity resonators based on MEMS 
Michael J. Burns, Juan M. Merlo, Luke D'Imperio, Michael J. Naughton
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Tuesday, March 14, 2017 
3:06PM - 3:18PM 
 
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H28.00004: Si nanostructures induced by ion-beam impact on SiO$_{\mathrm{2}}$ 
Camilla Ferreira de Sa Codeco, Sergio L.A. Mello, Germano M. Penello, Antonio C. F. Santos, Marcelo M. Sant'Anna, Krishynan S. F. M. Araujo
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Tuesday, March 14, 2017 
3:18PM - 3:30PM 
 
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H28.00005: Nonlinear Laser Lithography implementation for both ``normal'' and ``anomalous'' laser induced periodic structuring. 
Ihor Pavlov, Onur Tokel, Ozgun Yavuz, Ghaith Makey, Omer Ilday
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Tuesday, March 14, 2017 
3:30PM - 3:42PM 
 
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H28.00006: Monolithically integrated microfluidic channels in silicon for chip cooling 
Ahmet Turnali, Onur Tokel, Tahir Colakoglu, Mona Zolfaghari, Ihor Pavlov, Alpan Bek, Rasit Turan, Fatih Omer Ilday
  Preview Abstract | 
Tuesday, March 14, 2017 
3:42PM - 3:54PM 
 
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H28.00007: Laser slicing of silicon wafers 
Onur Tokel, Ahmet Turnali, Tahir Colakoglu, Ihor Pavlov, Mona Zolfaghari Borra, Ghaith Makey, Alpan Bek, Raşit Turan, Fatih Omer Ilday
  Preview Abstract | 
Tuesday, March 14, 2017 
3:54PM - 4:06PM 
 
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H28.00008: Strategies for alignment and e-beam contact to buried atomic-precision devices in Si 
Jonathan Wyrick, Pradeep Namboodiri, Xiqiao Wang, Roy Murray, Joseph Hagmann, Kai Li, Michael Stewart, Curt Richter, Richard Silver
  Preview Abstract | 
Tuesday, March 14, 2017 
4:06PM - 4:18PM 
 
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H28.00009: Characterization of reactive magnetron sputtering plasma during thin film deposition. 
Rylan Gordon, Hasitha Mahabaduge
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Tuesday, March 14, 2017 
4:18PM - 4:30PM 
 
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H28.00010: Domain-confined growth of hollow semiconductor nanocrystals indcued by an electron beam 
Luping Tang, Longbing He, Litao Sun
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Tuesday, March 14, 2017 
4:30PM - 4:42PM 
 
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H28.00011: Magnetometry with Quartz Tuning Fork 
Lu Chen, Fan Yu, Ziji Xiang, Colin Tinsman, Tomo Asaba, Benjamin Lawson, Weida Wu, Lu Li
  Preview Abstract | 
Tuesday, March 14, 2017 
4:42PM - 4:54PM 
 
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H28.00012: Influence of self-ordered Au nanoparticles on chemically textured Si surfaces with improved antireflection and hydrophobicity. 
Chetan Saini, Arabinda Barman, Mohit Kumar, B. Satpati, T. Som, Aloke Kanjilal
  Preview Abstract | 
Tuesday, March 14, 2017 
4:54PM - 5:06PM 
 
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H28.00013: Film-Wafer Bonding for Thermal Studies of a Twist Si Grain Boundar 
Dongchao Xu, Bo Xiao, Hongbo Zhao, Qing Hao
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Tuesday, March 14, 2017 
5:06PM - 5:18PM 
 
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H28.00014: Study of Damage and Recovery of Electron Irradiated Polyimide using EPR and NMR Spectroscopy 
Sunita Humagain, Jessica Jhonson, Phillip Stallworth, Daniel Engelhart, Elena Plis, Dale Ferguson, Russell Cooper, Ryan Hoffmann, Steve Greenbaum
  Preview Abstract |