Bulletin of the American Physical Society
APS March Meeting 2015
Volume 60, Number 1
Monday–Friday, March 2–6, 2015; San Antonio, Texas
Session F21: Focus Session: Advances in Scanned Probe Microscopy II: High Frequencies and Optical Techniques
8:00 AM–11:00 AM,
Tuesday, March 3, 2015
Room: 201
Sponsoring
Unit:
GIMS
Chair: Fabian Natterer, National Institute of Standards and Technology
Abstract ID: BAPS.2015.MAR.F21.3
Abstract: F21.00003 : Subsurface Imaging with the Scanning Microwave Microscope
8:24 AM–8:36 AM
Preview Abstract Abstract
Authors:
Joseph Kopanski
(Semiconductor and Dimensional Metrology Division, National Institute of Standards and Technology)
Lin You
(Semiconductor and Dimensional Metrology Division, National Institute of Standards and Technology)
Jonathan Michelson
(Semiconductor and Dimensional Metrology Division, National Institute of Standards and Technology)
Emily Hitz
(Semiconductor and Dimensional Metrology Division, National Institute of Standards and Technology)
Yaw Obeng
(Semiconductor and Dimensional Metrology Division, National Institute of Standards and Technology)
Collaboration:
Back End of the Line Reliability \& Metrology Project
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2015.MAR.F21.3
Follow Us |
Engage
Become an APS Member |
My APS
Renew Membership |
Information for |
About APSThe American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics. |
© 2024 American Physical Society
| All rights reserved | Terms of Use
| Contact Us
Headquarters
1 Physics Ellipse, College Park, MD 20740-3844
(301) 209-3200
Editorial Office
100 Motor Pkwy, Suite 110, Hauppauge, NY 11788
(631) 591-4000
Office of Public Affairs
529 14th St NW, Suite 1050, Washington, D.C. 20045-2001
(202) 662-8700