Bulletin of the American Physical Society

2006 APS March Meeting

Monday–Friday, March 13–17, 2006; Baltimore, MD

Session Index

Session G17: Focus Session: Emerging Research Devices and Materials for Microelectronics Industry I	Show Abstracts
Sponsoring Units: FIAP Chair: Mike C. Garner, Intel Corporation Room: Baltimore Convention Center 313

Tuesday, March 14, 2006 8:00AM - 8:12AM		G17.00001: The scanned-probe microscope as nano-metrology tool Ying Xu, K. Moloni, M.G. Lagally Preview Abstract
Tuesday, March 14, 2006 8:12AM - 8:24AM		G17.00002: Optical metrology of sub-wavelength critical dimensions of lines on Si wafers B.M. Barnes, R. Attota, T.A. Germer, Jay Jun, E. Marx, H. Patrick, M.T. Stocker, R.M. Silver Preview Abstract
Tuesday, March 14, 2006 8:24AM - 8:36AM		G17.00003: Measurement of Thicknesses of High-$\kappa $ Gate-Dielectric Films on Silicon by Angle-Resolved XPS Cedric Powell, Werner Smekal, Wolfgang Werner Preview Abstract
Tuesday, March 14, 2006 8:36AM - 8:48AM		G17.00004: Terahertz Spectroscopy as a non contact estimation technique of defect states in high dielectric constant materials Amartya Sengupta, Aparajita Bandyopadhyay, Hakan Altan, John Federici, Haim Grebel Preview Abstract
Tuesday, March 14, 2006 8:48AM - 9:00AM		G17.00005: 3D-Imaging of Non-spherical Silicon Nanoparticles Embedded in Silicon Oxide by Plasmon Tomography Aycan Yurtsever, Matthew Weyland, David A. Muller Preview Abstract
Tuesday, March 14, 2006 9:00AM - 9:36AM		G17.00006: Metrology for new microelectronic materials. Invited Speaker: Preview Abstract
Tuesday, March 14, 2006 9:36AM - 9:48AM		G17.00007: Internal dielectric interface: SiO$_{2}$- HfO$_{2}$ Onise Sharia, Alex Demkov, Genadi Bersuker, Byoung Hun Lee Preview Abstract
Tuesday, March 14, 2006 9:48AM - 10:00AM		G17.00008: Nanometer-resolution measurement and modeling of lateral variations of the effective work function at metal-bilayer /oxide interfaces W. Cai, K. -B. Park, J. P. Pelz Preview Abstract
Tuesday, March 14, 2006 10:00AM - 10:12AM		G17.00009: Is the oxygen vacancy the dominating charge trap in hafnia based MOSFETs? Jacob Gavartin, David Munoz-Ramo, Alexander Shluger, Marshall Stoneham, Gennadi Bersuker Preview Abstract
Tuesday, March 14, 2006 10:12AM - 10:24AM		G17.00010: Resistive Switching of Individual Dislocations in Insulating Perovskites -- A Potential Route Towards Nanoscale Non-Volatile Memories. Krzystof Szot, Wolfgang Speier, Gustav Bihlmayer, Rainer Waser Preview Abstract
Tuesday, March 14, 2006 10:24AM - 10:36AM		G17.00011: Electrical characteristic of metal-oxide-semiconductor with NiSi$_{2}$ nanocrystals embedded in oxide layer Jenn-Kai Tsai, Ikai Lo, M.H. Gau, Y.L. Chen, P.H. Yeh, T.C. Chang Preview Abstract
Tuesday, March 14, 2006 10:36AM - 10:48AM		G17.00012: Photoemission Studies of Nitrided Hafnium Silicates for High-$\kappa$ Dielectrics Anoop Mathew, Korhan Demirkan, Chang-Gong Wang, Glen Wilk, Robert Opila Preview Abstract

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Bulletin of the American Physical Society

2006 APS March Meeting

Monday–Friday, March 13–17, 2006; Baltimore, MD

Session Index

Session G17: Focus Session: Emerging Research Devices and Materials for Microelectronics Industry I

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