Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session GR2: Inductively Coupled Plasmas
10:00 AM–12:00 PM,
Thursday, October 12, 2023
Room: Michigan League, Henderson
Chair: De-Qi Wen, Department of Computational Mathematics Science and Engineering, Michigan State University
Abstract: GR2.00003 : Modeling of non-equilibrium effects in inductively coupled plasma discharges*
10:30 AM–10:45 AM
Presenter:
Sanjeev Kumar
(University of Illinois at Urbana-Champaign)
Authors:
Sanjeev Kumar
(University of Illinois at Urbana-Champaign)
Alessandro Munafo
(University of Illinois at Urbana-Champaign)
Sung Min Jo
(University of Illinois at Urbana-Champaign)
Marco Panesi
(University of Illinois at Urbana-Champaign)
The present work investigates on the study of non-equilibrium effects in inductively coupled plasmas (ICP) using state-of-the-art multi-physics computational framework developed at the Center for Hypersonics and Entry System Studies at UIUC. The framework couples a plasma solver with an electromagnetic solver to model the magneto-hydrodynamics in the ICP facility. Simulations performed using 2-T NLTE model reveals significant non-equilibrium effect in the ICP torch. Further, investigations using state-of-the-art collisional radiative (CR) models show non-Boltzmann population distribution of the internal states (e.g. electronic and vibrational states) of the species. Capturing these NLTE effects are of utmost importance for accurate modeling of the ICP facility experiments as well as in understanding the dynamics of plasma inside the ICP torch.
*This work is funded by Vannevar Bush Faculty Fellowhip OUSD(RE) (Grant No: N00014-21-1-295)
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