Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session GR2: Inductively Coupled Plasmas
10:00 AM–12:00 PM,
Thursday, October 12, 2023
Room: Michigan League, Henderson
Chair: De-Qi Wen, Department of Computational Mathematics Science and Engineering, Michigan State University
Abstract: GR2.00004 : Unraveling the Influence of Non-Maxwellian Electron Energy Distribution on Argon Inductively Coupled Plasma*
10:45 AM–11:00 AM
Presenter:
Maryam Khaji
(University of Illinois at Urbana-Champaign)
Authors:
Maryam Khaji
(University of Illinois at Urbana-Champaign)
Sanjeev Kumar
(University of Illinois at Urbana-Champaign)
Alessandro Munafo
(University of Illinois at Urbana-Champaign)
Alessandro Parente
(Université Libre de Bruxelles)
Marco Panesi
(University of Illinois at Urbana-Champaign)
*Support of the Belgian American Educational Foundation is gratefully acknowledged.
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