Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session GR2: Inductively Coupled Plasmas
10:00 AM–12:00 PM,
Thursday, October 12, 2023
Room: Michigan League, Henderson
Chair: De-Qi Wen, Department of Computational Mathematics Science and Engineering, Michigan State University
Abstract: GR2.00002 : Investigations of Pulse-to-Pulse Instabilities and Abnormal Electron Growth in Highly Electronegative Inductively Coupled Plasmas*
10:15 AM–10:30 AM
Presenter:
Tugba Piskin
(University of Michigan)
Authors:
Tugba Piskin
(University of Michigan)
Evan Litch
(University of Michigan)
Hyunjae Lee
(Samsung Electronics Co.)
Sang Ki Nam
(Samsung Electronics Co. Ltd.)
Mark Kushner
(University of Michigan)
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**Work was supported by Samsung Electronics and the National Science Foundation.
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