Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session GR2: Inductively Coupled Plasmas
10:00 AM–12:00 PM,
Thursday, October 12, 2023
Room: Michigan League, Henderson
Chair: De-Qi Wen, Department of Computational Mathematics Science and Engineering, Michigan State University
Abstract: GR2.00001 : Characterization of fundamental plasma parameters in a double inductively coupled plasma: simulation and experiment
10:00 AM–10:15 AM
Presenter:
Katharina Noesges
(Ruhr University Bochum, 44780 Bochum, Germany)
Authors:
Katharina Noesges
(Ruhr University Bochum, 44780 Bochum, Germany)
Jonathan Jenderny
(Ruhr University Bochum, 44780 Bochum, Germany)
Henrik Hylla
(Ruhr University Bochum, 44780 Bochum, Germany)
Dominik Filla
(Ruhr University Bochum, 44780 Bochum, Germany)
Ihor Korolov
(Ruhr University Bochum, 44780 Bochum, Germany)
Peter Awakowicz
(Ruhr University Bochum, 44780 Bochum, Germany)
Andrew R. Gibson
(Ruhr University Bochum, 44780 Bochum, Germany)
Thomas Mussenbrock
(Ruhr University Bochum, 44780 Bochum, Germany)
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