76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023;
Michigan League, Ann Arbor, Michigan
Session Index
Session FM1: Opportunities for Plasma Science and Engineering in Microelectronics Fabrication
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Show Abstracts |
Chair: Mark Kushner, University of Michigan; Steven Shannon, North Carolina State University
Room: Michigan League, Michigan
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Monday, October 9, 2023
10:00AM - 10:15AM
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FM1.00001: Introduction
Mark Kushner, Steven Shannon
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Monday, October 9, 2023
10:15AM - 10:50AM
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FM1.00002: Overview of Opportunities for Plasma Science and Engineering in Microelectronics Fabrication
Invited Speaker:
David B Graves
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Monday, October 9, 2023
10:50AM - 11:25AM
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FM1.00003: The Future Challenges of Semiconductor Processing
Invited Speaker:
Aaron Wilson
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Monday, October 9, 2023
11:25AM - 12:55PM
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FM1.00004: Lunch
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Monday, October 9, 2023
12:55PM - 1:30PM
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FM1.00005: Opportunities for Plasma Science and Engineering in Micro Electronics: The Grand Challenges Facing Equipment Manufacturers
Invited Speaker:
Alex Paterson
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Monday, October 9, 2023
1:30PM - 2:05PM
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FM1.00006: Overcoming Challenges in Semiconductor Manufacturing: Bridging Engineering and Science
Invited Speaker:
Sang Ki Nam
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Monday, October 9, 2023
2:05PM - 2:40PM
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FM1.00007: Challenges in Plasma Surface Interactions Control for Microelectronics Nanofabrication
Invited Speaker:
Gottlieb Oehrlein
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Monday, October 9, 2023
2:40PM - 3:15PM
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FM1.00008: High-Performance Computing in Plasma Reactor Scale Simulations: A Review and Prospects
Invited Speaker:
Laxminarayan L Raja
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Monday, October 9, 2023
3:15PM - 3:30PM
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FM1.00009: Coffee Break
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Monday, October 9, 2023
3:30PM - 4:05PM
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FM1.00010: Profile Simulation for Advanced Semiconductor Fabrication: Challenges and Opportunities from the Etch Perspective
Invited Speaker:
Du Zhang
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Monday, October 9, 2023
4:05PM - 4:40PM
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FM1.00011: Role of Machine Learning
Invited Speaker:
Satoshi Hamaguchi
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Monday, October 9, 2023
4:40PM - 4:50PM
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FM1.00012: Break
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Monday, October 9, 2023
4:50PM - 5:30PM
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FM1.00013: Panel Discussion
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