Bulletin of the American Physical Society
76th Annual Gaseous Electronics Conference
Volume 68, Number 9
Monday–Friday, October 9–13, 2023; Michigan League, Ann Arbor, Michigan
Session FM1: Opportunities for Plasma Science and Engineering in Microelectronics Fabrication
10:00 AM–5:30 PM,
Monday, October 9, 2023
Room: Michigan League, Michigan
Chair: Mark Kushner, University of Michigan; Steven Shannon, North Carolina State University
Abstract: FM1.00006 : Overcoming Challenges in Semiconductor Manufacturing: Bridging Engineering and Science
1:30 PM–2:05 PM
Presenter:
Sang Ki Nam
(Samsung Electronics)
Authors:
Sang Ki Nam
(Samsung Electronics)
Sang Wuk Park
(Samsung Electronics)
Bong Jin Kuh
(Samsung Electronics)
Doug-yong Sung
(Samsung Electronics)
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