75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session Index
Session DT1: Plasma Surface Interaction I
Chair: Jan Trieschmann, Kiel University
Room: Sendai International Center Tachibana
Tuesday, October 4, 2022
8:00AM - 8:15AM
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DT1.00001: Photoemission induced plasma breakdown
Brian Z Bentz, Kevin Youngman, Asif Iqbal, Yang Zhou, Peng Zhang
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Tuesday, October 4, 2022
8:15AM - 8:30AM
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DT1.00002: GEC Student Excellence Award Finalist Presentation - Dynamic surface surrogate model trained on atomistic data of AlN sputter depositions
Tobias Gergs, Thomas Mussenbrock, Jan Trieschmann
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Tuesday, October 4, 2022
8:30AM - 9:00AM
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DT1.00003: Strategies to Enhance Etch Selectivity During Fluorocarbon Plasma-Assisted Atomic Layer Etching of Silicon-Based Dielectrics
Invited Speaker:
Sumit Agarwal
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Tuesday, October 4, 2022
9:00AM - 9:15AM
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DT1.00004: Secondary electron emission due to atomic and molecular iodine ion bombardment
Lui Habl, Dmytro Rafalskyi, Trevor Lafleur
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Tuesday, October 4, 2022
9:15AM - 9:30AM
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DT1.00005: Evidence of the dominant production mechanism of ammonia in a H2/N2 plasma
James Ellis, Daniel Köpp, Norbert Lang, Jean-Pierre H van Helden
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Session DT2: Capacitively Coupled Plasmas I
Chair: Aranka Derzsi, Wigner Research Centre, Hungary
Room: Sendai International Center Tachibana
Tuesday, October 4, 2022
10:00AM - 10:30AM
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DT2.00001: Resonant sheath heating in weakly magnetized capacitively coupled plasmas due to electron-cyclotron motion
Invited Speaker:
Jing-Yu Sun
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Tuesday, October 4, 2022
10:30AM - 10:45AM
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DT2.00002: GEC Student Excellence Award Finalist Presentation - Uniformity control by customized electrode designs in capacitive RF plasmas
Li Wang, Peter Hartmann, Zoltan Donko, Yuan-Hong Song, Julian Schulze
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Tuesday, October 4, 2022
10:45AM - 11:00AM
Author not Attending
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DT2.00003: Effect of the low-frequency voltage on nonlinear standing wave excitation in dual-frequency asymmetric capacitive discharges
Fang-Jie Zhou, Jian-Kai Liu, Kai Zhao, You-Nian Wang
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Tuesday, October 4, 2022
11:00AM - 11:15AM
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DT2.00004: Surface effects in a capacitive argon discharge in the intermediate pressure regime
Jon T Gudmundsson, Janez Krek, De-Qi Wen, Emi Kawamura, Michael A Lieberman
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Tuesday, October 4, 2022
11:15AM - 11:30AM
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DT2.00005: The effects of different boundary surface materials on electron power absorption dynamics in capacitive RF plasmas
Florian Beckfeld, David A. Schulenberg, Ihor Korolov, Julian Schulze
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Tuesday, October 4, 2022
11:30AM - 11:45AM
Author not Attending
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DT2.00006: Kinetic behaviors of secondary electrons in magnetized capacitively coupled argon plasmas
Hui Wen, Jing-Yu Sun, Quan-Zhi Zhang, You-Nian Wang
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Tuesday, October 4, 2022
11:45AM - 12:00PM
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DT2.00007: GEC Student Excellence Award Finalist Presentation - Striations in dual-low-frequency (2/10 MHz) driven capacitively coupled CF4 plasma
Xiao-Kun Wang, Yong-Xin Liu, Julian Schulze, Zoltán Donk´o, You-Nian Wang
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Session DT3: Plasmas and Nanotechnology II
Chair: Tsuyohito Ito, The University of Tokyo
Room: Sendai International Center Tachibana
Session DT5: Women in Science
Chair: Noriko Hosaka, Tohoku University / National Institute of Technology, Sendai College, Japan
Room: Sendai International Center Tachibana
