Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session DT2: Capacitively Coupled Plasmas I
10:00 AM–12:00 PM,
Tuesday, October 4, 2022
Sendai International Center
Room: Tachibana
Chair: Aranka Derzsi, Wigner Research Centre, Hungary
Abstract: DT2.00001 : Resonant sheath heating in weakly magnetized capacitively coupled plasmas due to electron-cyclotron motion*
10:00 AM–10:30 AM
Presenter:
Jing-Yu Sun
(Dalian University of Technology, China)
Authors:
Jing-Yu Sun
(Dalian University of Technology, China)
Quan-Zhi Zhang
(Dalian University of Technology, China)
Julian Schulze
(Ruhr-University Bochum, Germany)
You-Nian Wang
(Dalian University of Technology, China)
Collaboration:
PSEG
* the National Natural Science Foundation of China (NSFC) (Grants No. 11935005 and No. 12020101005) and the German Research Foundation in the frame of the project "Plasmabasierte Prozessfuehrung von reaktiven Sputterprozessen" (No. 417888799).
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