Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session HT4: Poster Session I (4:00-6:00pm, JST)
4:00 PM,
Tuesday, October 4, 2022
Sendai International Center
Room: Sakura 1
Abstract: HT4.00111 : Fabrication of Amorphous Carbon Nitride Films with High [N]/([N]+[C]) Ratios Using the Plasma Chemical Vapor Deposition of the Gas Mixture of C2H2 with N2 : The Possibility to obtain the [N]/([N]+[C]) Ratio of >0.5
Presenter:
Haruhiko Ito
(Nagaoka Univ of Tech)
Authors:
Haruhiko Ito
(Nagaoka Univ of Tech)
Yuga Satoh
(Nagaoka Univ Tech)
Tsuneo Suzuki
(Nagaoka Univ Tech)
Hidetoshi Saitoh
(Nagaoka Univ Tech)
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