Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session GF2: Plasmas for Energy Applications
10:00 AM–12:00 PM,
Friday, October 7, 2022
Sendai International Center
Room: Shirakashi 2
Chair: Ahmad Hamdan, University de Montreal
Abstract: GF2.00006 : Plasma-induced electronic defects: formation and recovery kinetics for advanced processing*
11:15 AM–11:45 AM
Presenter:
Shota Nunomura
(AIST)
Author:
Shota Nunomura
(AIST)
In this talk, we show the defect generation and annihilation kinetics in SHJ solar cells during solar cell fabrication [1]. The cell fabrication begins with (i) silicon wafer cleaning by RCA-based wet process, (ii) surface passivation/ junction formation by plasma-enhanced chemical vaper deposition (PECVD), (iii) transparent conductive oxide (TCO) electrode deposition by magnetron sputtering, and (iv) postannealing. The amount of defects is examined at each step of the cell fabrication, and it is evaluated with the minority carrier lifetime measured by the quasi-steady-state photoconductance (QSSPC) technique. The minority carrier lifetime is inversely proportional to the density of defects. We find that the carrier lifetime, i.e., the density of defects, is highly dependent on PECVD and sputtering process. The lifetime is significantly improved by the surface passivation with a-Si:H layer, strongly deteriorated by the TCO deposition by sputtering, and properly recovered by the postannealing. To study the details of defect kinetics, we perform in-situ photocurrent measurement during PECVD [2, 3]. The details of experimental methods and results are presented in the talk. The defect kinetics will be discussed.
*The author is grateful to Dr. I. Sakata for fruitful discussions. This work was supported in part by JSPS KAKENHI (Grant Number 18K03603) and New Energy and Industrial Technology Development Organization (NEDO).
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