Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session FR1: Magnetron Plasmas
8:00 AM–9:30 AM,
Thursday, October 6, 2022
Sendai International Center
Room: Shirakashi 1
Chair: Yevgeny Raitses, PPPL
Abstract: FR1.00005 : Formation and sustainment of spokes in planar dc magnetrons*
9:15 AM–9:30 AM
Presenter:
Denis Eremin
(Ruhr Univ Bochum)
Authors:
Denis Eremin
(Ruhr Univ Bochum)
Liang Xu
(Ruhr Univ Bochum)
Jens Kallaehn
(Ruhr Univ Bochum)
Kevin Koehn
(Ruhr Univ Bochum)
Dennis Krueger
(Ruhr Univ Bochum)
Ralf Peter Brinkmann
(Ruhr Univ Bochum)
deposition technique employing the PVD process. To reduce the interaction of neutrals sputtered
from the target with the working gas, the latter is typically kept at a low pressure, less than a few Pa.
To sustain the discharge at such a low pressure, a magnetic field confining electrons is required.
To increase the deposition rate, it is required to increase the power absorbed by the discharge,
which in turn demands an enhanced current. Experimental data suggest that the current increase
is often associated with observations of the rotating spoke structures. By utilizing 2D and 3D simulations
conducted with an implicit electrostatic energy-conserving PIC/MCC code, in the present work we argue that
formation and sustainment of spokes in planar dc magnetrons featuring an inhomogeneous magnetic field
results from a self-consistent interaction between the ionization and the potential landscapes,
which involves instabilities. Different mechanisms leading to the electron energization and the
related shaping of the ionization profile are addressed.
*This work was funded by the German Research Foundation within the framework of theSonderforschungsbereich SFB-TR 87.
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