Thursday, October 6, 2022
1:30PM - 1:45PM
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ER4.00001: Experimental and computational study of the electron power absorption in capacitively coupled neon-oxygen plasmas
Aranka Derzsi, Peter Hartmann, Mate Vass, Benedek Horvath, Marton Gyulai, Ihor Korolov, Julian Schulze, Zoltan Donko
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Thursday, October 6, 2022
1:45PM - 2:00PM
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ER4.00002: Effect of voltage waveform tailoring and an additional 60 MHz frequency on the ion flux energy distribution function in a low pressure capacitively coupled radio frequency plasma
Gerrit Hübner, Ihor Korolov, Stefan Ries, Soheil Karimi Aghda, Jochen M Schneider, Jan Trieschmann, Thomas Mussenbrock, Julian Schulze, Peter Awakowicz, Tobias Gergs
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Thursday, October 6, 2022
2:00PM - 2:15PM
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ER4.00003: Stratification of Capacitively Coupled Plasma in Noble Gases
Vladimir I Kolobov, Robert Arslanbekov
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Thursday, October 6, 2022
2:15PM - 2:30PM
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ER4.00004: The mechanism of frequency coupling in low pressure dual-frequency capacitively coupled plasmas revisited based on the Boltzmann term analysis
Máté Vass, Li Wang, Sebastian Wilczek, Trevor Lafleur, Ralf Peter Brinkmann, Zoltan Donko, Julian Schulze
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Thursday, October 6, 2022
2:30PM - 2:45PM
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ER4.00005: Pressure dependence on spatio-temporal distribution of excitation rates of Ar 2p1 and Ne 2p1 in Ar and Ar/Ne capacitively coupled plasmas
Michihiro Otaka, Toshiaki Arima, Jian-syun Lai, Kizuki Ikeda, Kunihiro Kamataki, Naoto Yamashita, Takamasa Okumura, Naho Itagaki, Kazunori Koga, Masaharu Shiratani
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Thursday, October 6, 2022
2:45PM - 3:00PM
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ER4.00006: Generation of surface modes and plasma uniformity in VHF CCP reactors studied with a EM PIC code
Denis Eremin, Efe Kemaneci, Masaaki Matsukuma, Thomas Mussenbrock, Ralf Peter Brinkmann
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Thursday, October 6, 2022
3:00PM - 3:15PM
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ER4.00007: Current and voltage (I-V) characteristics of intermediate pressure plasma
Shadhin Hussain, Matthew Goeckner
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Thursday, October 6, 2022
3:15PM - 3:30PM
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ER4.00008: Wave Characteristics in E×B Source: Pressure-Dependent Evolution of Plasma Oscillation Phenomena
June Young Kim, Cheongbin Cheon, Jinyoung Choi, Y. S. Hwang, Kyoung-Jae Chung, Hae June Lee
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