Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session DR2: Plasma Surface Interaction III |
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Chair: Shinya Kumagai Room: Sendai International Center Tachibana |
Thursday, October 6, 2022 10:00AM - 10:30AM |
DR2.00001: The interplay of surface processes and negative ions in radio-frequency driven oxygen and hydrogen plasmas Invited Speaker: Timo Gans Surface interactions and negative ions play key roles in the properties of reactive molecular processing plasmas. Radio-frequency driven oxygen and hydrogen plasmas are ideal test-beds for investigations into the role of surface interactions for the chemical kinetics of the plasma and associated negative ion formation. Oxygen containing plasmas can exhibit either mostly electro-negative or mostly electro-positive characters [1, 2]. Oxygen negative ions can be efficiently destroyed by singlet oxygen which in turn is itself strongly influenced by surface reactions and surface properties [3]. Atomic oxygen, as a key reactive species, can also be dependent on surface properties [4]. In hydrogen plasmas, negative ions can be produced through surface processes as well as volume processes [5]. Nitrogen doped diamond surfaces are promising candidates for enhanced surface production of negative hydrogen ions [6,7]. Volume processes are determined by dissociative attachment involving vibrationally exited hydrogen molecules. These in turn are also dependent on surface properties [5]. This interplay between surface properties and the plasma chemical kinetics as well as plasma dynamics will be discussed for the examples of single [1,3,4,5,6,7] and multi-frequency [2,8,9] driven oxygen and hydrogen plasmas. |
Thursday, October 6, 2022 10:30AM - 10:45AM Author not Attending |
DR2.00002: Investigation of oxygen permeation enhancement with He/O2 plasma and SOEC interaction Richard van de Sanden, Xingyu Chen, Floran Peeters, Felix Smits, waldo bongers High temperature solid-oxide electrolysis cells (SOECs) using oxygen-selective conducting membrane in combination with plasma has shown high conversion efficiencies in nitrogen fixation and CO2 conversion, which provides a promising method for renewable energy usage and gas conversion. But the underlying kinetics and limiting rates of the plasma-assisted oxygen conducting membrane remain not clear. The plasma-activated species (e.g., by plasma-excitation, dissociation and ionization) may promote the reduction kinetics on the ion-conducting membrane surface. The effects of plasma-induced surface charging and local fields on the exchange kinetics may also play a significant role in the improvement of the oxygen permeation fluxes of the ion-conducting membrane. To understand the interaction of the plasma and the oxygen-conducting membrane, we develop a dedicated plasma-SOEC reactor to investigate the plasma enhanced oxygen permeation mechanism. |
Thursday, October 6, 2022 10:45AM - 11:00AM |
DR2.00003: Propagation of Ionization Waves on Dielectric Substrates in Atmospheric Pressure Plasma Jets (APPJ) Joshua Morsell, Kseniia Konina, Mark J Kushner, Steven Shannon The interaction of APPJs with dielectric surfaces is important to applications from plasma catalysis to biotechnology. The propagation of ionization waves by an APPJ was investigated as they impact dielectric surfaces of varying thickness and convert to surface ionization waves (SIWs). The APPJ was powered by a +4kV 500ns DC pulse with 1kHz rep rate. Helium was the working gas flowing into room air. A gated ICCD with 5ns shutter speed was used for imaging. The surfaces consisted of stacked glass of varying thickness from 0.15 – 10.1mm. The experiments were modeled using the 2D plasma-hydrodynamics model nonPDPSIM. Surface wave velocity strongly depends on glass thickness, increasing by a factor of 3 for thicknesses of 0.15 - 1.65mm. Greater than 1.65mm the velocity saturates out to 10.1mm. Surface velocity ranges from 1.5-4.5x104 m/s. Axial velocities range from 1.55-1.81x105 m/s. The speed of the SIWs are well correlated with the capacitance (F/cm2) of the surface through voltage division between the SIW and dielectric that increase velocity with decreasing capacitance to a saturation point. The underlying dielectric must charge for the SIW to proceed; lower capacitance charges faster. |
Thursday, October 6, 2022 11:00AM - 11:15AM |
DR2.00004: An in-situ technique for the estimation of surface coefficients based on characteristics in the ion energy distribution of capacitively coupled plasmas Christian Schulze, Zoltan Donko, Jan Benedikt Secondary electron emission (SEE) is known to have a significant influence on plasma properties such as electron temperature and plasma density due to the injection of high-energy electrons into the plasma, which are generated when the emitted electrons are accelerated in the sheath potential. As the plasma properties and emitted electrons also have an impact on the sheath width and spatiotemporal potential distribution, the ion energy distribution function (IEDF) at the electrodes show signatures that depend indirectly on the emission coefficients. Here, the influence of SEE on the bimodal peak structure, which is formed by ions that traverse the sheath without collisions is analyzed in detail. In particular, (i) its position corresponding to the acceleration through the mean sheath potential and (ii) the peak separation in the bimodal structure corresponding to the sheath potential variation during an rf cycle, depend differently on the effective ion induced SEE yield (γeff) and the effective elastic electron reflection probability (reff). We present a technique that combines energy-resolved mass spectrometric measurements and 1d3v particle-in-cell/Monte Carlo collision simulations to determine both parameters simultaneously and independently in a symmetric rf capacitively coupled plasma in argon. The method is applied to stainless steel and aluminum oxide surfaces resulting in a good agreement with literature values. This technique allows for a straightforward estimation of SEE coefficients for all materials that can be deposited on the plasma electrodes. |
Thursday, October 6, 2022 11:15AM - 11:30AM |
DR2.00005: Hydrogen accumulation and surface bubbling of liquidized Sn-Bi-Li-Er alloy under hydrogen plasma exposure Kota Tamura, Haruka Suzuki, Junichi Miyazawa, Suguru Masuzaki, Masayuki Tokitani, Hirotaka Toyoda Behavior of liquidized Sn-Bi-Li-Er (SBLE) alloy under hydrogen plasma exposure is investigated for its application to nuclear fusion devices. SBLE is liquidized in a vacuum chamber using infrared heater and is exposed to inductively coupled hydrogen plasma. Surface morphology of the SBLE is observed by a high-speed camera and time variation of H2 partial pressure is monitored by a differentially-pumped quadruple mass analyzer (QMA). During hydrogen plasma exposure, bubbling phenomenon on the liquidized SBLE surface is observed. With varying ion flux to the SBLE sample, increase in bubble rupture per unit time is seen. H2 accumulation inside the bubble is confirmed by partial pressure measurement using the QMA. Droplets produced by ruptured SBLE bubble is investigated by X-ray photoelectron spectroscopy and Li atomic composition of >99% is observed. From the result, Li segregation followed by lithium hydride formation on the surface is suggested as the origin of the bubble formation. |
Thursday, October 6, 2022 11:30AM - 11:45AM |
DR2.00006: Plasmonic plasma process for low temperature growth of high-quality ultra-thin dielectric films Takeshi Kitajima, Kazuyasu Watanabe, Mahiko Miyake, Toshiki Nakano The discharge plasma can be regarded as a vibration phenomenon of electrons in the gas phase, and high-energy electrons cause a non-equilibrium reaction. Similarly, the electrons in the gold nanoparticles also vibrate due to the electric field to form plasmons, and the high-energy electrons can cause a non-equilibrium reaction. In this study, gold nanoparticles are placed on a silicon substrate exposed to low-pressure reactive plasma, and plasmons generated by light irradiation and radical atoms supplied by the plasma realize oxidation and nitridation of the silicon substrate in an environment extremely close to room temperature. Gold nanoparticles are formed by vapor deposition, with an average particle size of 6 nm. 1 Pa pure oxygen or nitrogen plasma is formed by inductively coupled plasma. Infrared or green light is suitable for plasmon excitation. Space potential control with stainless steel mesh electrodes was used to protect the nanoparticles. Insulating films were formed by a 10-minute treatment at room temperature and were evaluated by mercury probe method. The film quality was found to be equivalent to that of an ideal thermal oxide film or SiON film, demonstrating the significance of plasmon-based plasma processes. |
Thursday, October 6, 2022 11:45AM - 12:00PM |
DR2.00007: Atmospheric Pressure Plasma with Micro Interdigitated Electrode for Polymer Surface Modification. Yoshito Manabe, Kaishu Imanaka, Tatsuru Shirafuji, Jun-Seok Oh Optically and mechanically excellent properties of polymer are importance for developing of recent polymer-based device such as microfluidics. Polystyrene (PS) in cell and tissue culture and polymethyl methacrylate (PMMA) in contact lens are well-known polymers in early biomedical research. In recent, cyclic olefin polymer (COP) also known as cyclic olefin copolymer (COC) with higher transparency, low autofluorescence, and higher heat resistant is getting importance in development of microfluidics. |
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