Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session DR1: Model Validation & Verification |
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Chair: Kallol Bera, Applied Materials, Inc. Room: Sendai International Center Tachibana |
Thursday, October 6, 2022 8:00AM - 8:15AM |
DR1.00001: Simulation of an inductively coupled RF discharge using fluid moment models Alejandro Alvarez Laguna, Adnan Mansour, Yusuke Yamashita, Kentaro Hara, Benjamin Esteves, Anne Bourdon, Pascal Chabert Most of the fluid models for gas discharges are based on the drift-diffusion approximation that neglects the inertial terms of the different species within plasma. However, the drift-diffusion approximation fails at low-pressure, when the ion mean-free-path becomes larger or comparable to the size of the device. In this work, we study the numerical solution of velocity-moment hierarchies. These models contain the inertial terms and solve for higher moments, i.e., mass, momentum, energy, heat flux, etc, for each of the species within plasma, allowing for investigation of non-equilibrium conditions that are beyond the drift-diffusion approximation. We study the transport of plasma in an 1D inductively coupled plasma (ICP) discharge with different moment models. In this presentation, we will discuss the closure of the moment models as well as the numerical resolution of the equations and we will benchmark the solutions of the novel model to kinetic simulations. |
Thursday, October 6, 2022 8:15AM - 8:30AM |
DR1.00002: Coupling Finite Element and Finite Volume within the Plasma Fluid Code: Zapdos Corey Dechant, Casey T Icenhour, Grayson Gall, Shane Keniley, Alexander D Lindsay, Davide Curreli, Steven Shannon This work focuses on adding capability to couple finite element (FE) variables into finite volume (FV) physics for the open-source multi-fluid plasma code, Zapdos, within INL's Multiphysics Object-Oriented Simulation Environment (MOOSE). This coupling can allow for improvement of multiphysics simulations where one set of physics is best suited for an FE discretization, while another set is best suited for an FV discretization. Plasma dynamics is a fitting example where the electromagnetic field equations are solved with FE and the fluid flow is solved with FV. The new FE to FV coupling method can be summarized as taking the element or face average of the FE variable value or gradient and applying that quantity directly in the FV equation objects. Verification and validation (V&V) were conducted based on Zapdos FE-only V&V efforts. Verification included method of manufactured solutions (MMS) with spatial and temporal convergence studies. These MMS studies were modularized, such that simple decoupled physics to fully coupled multi-fluid problems were studied. Validation included benchmarking with FE-only simulations to investigate the benefits of FE-FV coupling over the traditional FE-only simulations. Initial V&V studies show good alignment to theory and previous simulation. |
Thursday, October 6, 2022 8:30AM - 8:45AM |
DR1.00003: Important role of excited state atoms in low pressure capacitive rf argon discharges De-Qi Wen, Janez Krek, Jon T Gudmundsson, Emi Kawamura, Michael A Lieberman, Peng Zhang, John P Verboncoeur We present the important role of realistic electron-induced secondary electron emission (SEE) [Vaughan, IEEE Trans. Electron Devices 40, 830 (1993)], metastable atom and photon-induced secondary electrons from electrodes on the plasma density in low pressure capacitive argon discharge at 13.56MHz. With the above three kinds of secondary electron emission included in the particle-in-cell (PIC) simulations, the plasma density shows good agreement with that from recent experiments [Schulenberg et al Plasma Sources Sci. Technol. 30 (2021) 105003] at low pressure (1-10 Pa). At 20Pa, the plasma densities in PIC simulation are higher than the experiments for 250 and 350V, which is the subject of further investigation. The mechanism of plasma density enhancement due to secondary electron emission will also be discussed in detail. |
Thursday, October 6, 2022 8:45AM - 9:00AM |
DR1.00004: Space-charge limited current flow: An analytical verification solution for kinetic and fluid simulations Trevor Lafleur Verification of numerical simulations is an important step in code development as it demonstrates the correctness of the code in solving the underlying physical model. Analytical solutions represent a strong tool in code verification, but due to the complexity of the fundamental equations, such solutions are often not available. This is particularly true in the case of kinetic models. Here we present a family of fully analytical solutions describing current transmission between two electrodes and which apply to both fluid, and kinetic, descriptions of the system. The solutions account for the finite initial particle injection velocity and are valid for injection currents between zero and the maximum at the space-charge limit. In addition to determining this space-charge limited current, spatial profiles of all physical quantities (such as the particle density and velocity) are also obtained. This provides a means to not only verify fluid and kinetic simulations, but also to assess the error and accuracy of the numerical simulation parameters used. The analytical solutions extend the classical Child-Langmuir law (which only applies to an initial injection velocity equal to zero), and provide new insight into space-charge limited current flow. |
Thursday, October 6, 2022 9:00AM - 9:15AM |
DR1.00005: Benchmarking between fluid and global models for low-pressure oxygen DC glow discharges Pedro Viegas, Dmitry Voloshin, Tiago C Dias, Chloé Fromentin, Tiago Silva, Alexander Chukalovsky, Yuri Mankelevich, Tatyana Rakhimova, Vasco Guerra Numerical modelling is used to understand physical phenomena and to characterize electrical discharges, where many important quantities are often difficult to measure. Plasma models can have different dimensionality. On the one hand, zero-dimensional global models treat physical quantities as volume averages and are often used to describe homogeneous plasmas or to focus on complex kinetic processes. On the other hand, spatially-resolved fluid models are an effective way to describe spatial gradients in plasmas. In this work, a global model and a one-dimensional (1D-radial) fluid model are used to describe low-pressure (0.5 to 10 Torr) oxygen DC glow discharges. The used set-up and the resulting discharges have been well characterized through both experiments and simulations, and thus constitute ideal test-cases for benchmarking different models. The two models consider the same input parameters and reaction set. Their simulation results are compared and their appropriateness for the description of different discharge conditions is evaluated. |
Thursday, October 6, 2022 9:15AM - 9:30AM |
DR1.00006: Simulation benchmarks of the XPDP1 PIC-MCC code on capacitively coupled plasma helium discharges Guoning Wang, Kaviya Aranganadin, Hua-Yi Hsu, John P. Verboncoeur, Ming-Chieh Lin The particle-in-cell Monte Carlo collision (PIC-MCC) code, XPDP1, developed by Plasma Theory and Simulation Group (PTSG) formerly at UC Berkeley now at Michigan State University is a bounded electrostatic code for simulating one-dimensional (1-D) plasma devices and widely used in academia and industry. Turner et al. did detailed benchmarks of five 1-D PIC-MCC codes for low-pressure plasmas. However, the XPDP1 was not included. In this study, we conduct a simulation benchmark of the XPDP1 code using the same four cases of capacitively coupled plasma (CCP) discharge in helium. As the cross section data play an important role in describing charge and neutral collisions in a plasma discharge, we report the investigation of the differences in a helium CCP discharge between employing the imported LXCat data of helium cross sections and the functional cross sections originally used in the XPDP1 code. In addition to the time required to reach steady states and the computing speeds, the plasma densities and distributions due to different cross sections are compared to the PIC-MCC results in the literature as well as those predicted by a moment model as implemented in COMSOL Multiphysics. The results suggest that the users of the PTSG codes might need an update to use the LXCat cross section data for their plasma discharge studies. |
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