Bulletin of the American Physical Society
75th Annual Gaseous Electronics Conference
Volume 67, Number 9
Monday–Friday, October 3–7, 2022;
Sendai International Center, Sendai, Japan
The session times in this program are intended for Japan Standard Time zone in Tokyo, Japan (GMT+9)
Session DR1: Model Validation & Verification
8:00 AM–9:30 AM,
Thursday, October 6, 2022
Sendai International Center
Room: Tachibana
Chair: Kallol Bera, Applied Materials, Inc.
Abstract: DR1.00001 : Simulation of an inductively coupled RF discharge using fluid moment models
8:00 AM–8:15 AM
Presenter:
Alejandro Alvarez Laguna
(Laboratoire de Physique des Plasmas, CNRS, E. Polytechnique)
Authors:
Alejandro Alvarez Laguna
(Laboratoire de Physique des Plasmas, CNRS, E. Polytechnique)
Adnan Mansour
(Stanford University)
Yusuke Yamashita
(Stanford University)
Kentaro Hara
(Stanford University)
Benjamin Esteves
(Ecole Polytechnique)
Anne Bourdon
(CNRS, LPP, Ecole Polytechnique)
Pascal Chabert
(Ecole Polytechnique)
Follow Us |
Engage
Become an APS Member |
My APS
Renew Membership |
Information for |
About APSThe American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics. |
© 2024 American Physical Society
| All rights reserved | Terms of Use
| Contact Us
Headquarters
1 Physics Ellipse, College Park, MD 20740-3844
(301) 209-3200
Editorial Office
100 Motor Pkwy, Suite 110, Hauppauge, NY 11788
(631) 591-4000
Office of Public Affairs
529 14th St NW, Suite 1050, Washington, D.C. 20045-2001
(202) 662-8700