Spectra of a geometry improved ideal model of the pMRP*

The planar multipole resonance probe (pMRP) is a diagnostic-tool based on the concept of active plasma resonance spectroscopy (APRS), which excites the plasma in the GHz range and records the response to detect resonances. Due to its planar design the pMRP is especially suited to monitor plasma processes without perturbing them. To determine plasma parameter from measured resonances, a model for the relation between plasma and resonance parameter is required. Previous work showed a deviation of the analytical solution for the ideal model to the full 3D electromagnetic simulations of the real pMRP. This difference is mainly caused by the idealized geometry instead of the electrostatic approximation in the analytical model. To allow for a better agreement of the spectra the model of the pMRP can be improved with a more realistic geometry, but requires partially numerical calculations which can still be applied in the functional analytic approach. The resulting spectra will be compared to full electromagnetic simulations and former analytical results.