Bulletin of the American Physical Society
74th Annual Gaseous Electronics Conference
Volume 66, Number 7
Monday–Friday, October 4–8, 2021;
Virtual: GEC Platform
Time Zone: Central Daylight Time, USA
Session HW14: Plasma-surface Interactions II
8:00 AM–9:45 AM,
Wednesday, October 6, 2021
Virtual
Room: GEC platform
Chair: Shaun Smith, Lam Research
Abstract: HW14.00006 : Effects of Sputtering, Re-deposition and Diffusion Processes for Helium Plasma Induced Metal-nanostructure with Multi-hybrid Simulation Analysis*
9:15 AM–9:45 AM
Presenter:
Atsushi M Ito
(National Institute for Fusion Science)
Authors:
Atsushi M Ito
(National Institute for Fusion Science)
Arimichi Takayama
(National Institute for Fusion Science)
Hiroaki Nakamura
(National Institute for Fusion Science)
We, therefore, developed the BCA-MD-KMC multi-hybrid simulation[2]. In this way, the irradiation process of helium ions is solved binary collision approximation (BCA), the thermal diffusion process of helium atoms in a tungsten material is solved by kinetic Monte-Carlo (KMC), and the deformation of the tungsten material due to the agglomerated helium nano-bubble is solved by molecular dynamics (MD). As a result, with the same irradiation flux as an experimental condition, the irradiation time of 100 seconds can be achieved in a simulation during about one month.
From the simulation, we propose the formation mechanisms as follows. By the low energy helium irradiation, which cannot sputter out the tungsten atom, many helium nano-bubbles generated in tungsten material. On rough surfaces after nano-bubbles burst, the binding energy of tungsten becomes low. As a result, tungsten atoms can be sputtered by the low energy helium ion. Simultaneously the sputtered tungsten atoms redeposit on the protrusions area created by the bursting. The transport of tungsten atoms by these sputtering and redeposition causes the fuzz to grow vertically from the surface.
*The present work was supported by KAKENHI(19H01882, 19K21870, and 19H01874).
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