Bulletin of the American Physical Society
74th Annual Gaseous Electronics Conference
Volume 66, Number 7
Monday–Friday, October 4–8, 2021;
Virtual: GEC Platform
Time Zone: Central Daylight Time, USA
Session HW14: Plasma-surface Interactions II
8:00 AM–9:45 AM,
Wednesday, October 6, 2021
Virtual
Room: GEC platform
Chair: Shaun Smith, Lam Research
Abstract: HW14.00005 : VUV-Photoionisation Chamber for the Characterization of Ion-Substrate Interactions at Atmospheric Pressure*
9:00 AM–9:15 AM
Presenter:
Kerstin Sgonina
(Institute of Experimental and Applied Physics, Kiel University, Germany)
Authors:
Kerstin Sgonina
(Institute of Experimental and Applied Physics, Kiel University, Germany)
Alexander Quack
(Institute of Experimental and Applied Physics, Kiel University, Germany)
Christian Schulze
(Institute of Experimental and Applied Physics, Kiel University, Germany)
Tristan Winzer
(Institute of Experimental and Applied Physics, Kiel University, Germany)
Leonie Mohn
(Institute of Experimental and Applied Physics, Kiel University, Germany)
Jan Benedikt
(Institute of Experimental and Applied Physics, Kiel University, Germany)
To study the isolated interaction of ions with substrates, an experimental setup has been developed in which photoionized ions are directed towards the biological substrate. The ions are generated in a helium atmosphere with a small admixture of Ar, O2 or other gaseous species by VUV radiation of the helium excimer emission (60-100nm) generated by a helium driven atmospheric pressure plasma. Mass spectra and relative ion fluxes along the substrate position are measured by ion mass spectrometry. Combined with spatial resolved current measurements, the absolute ion flux can be determined.
*Funded by the German Research Foundation (DFG) – 356768018.
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