72nd Annual Gaseous Electronics Conference
Volume 64, Number 10
Monday–Friday, October 28–November 1 2019;
College Station, Texas
Session Index
Session DT1: Plasma Thrusters
Chair: Ricky Tang, Sandia National Laboratories
Room: Century I
Tuesday, October 29, 2019
10:00AM - 10:15AM
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DT1.00001: Hall thrusters instabilities analysis with 2D (axial-azimuthal) Particle-In-Cell simulations
Thomas Charoy, Antoine Tavant, Anne Bourdon, Pascal Chabert
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Tuesday, October 29, 2019
10:15AM - 10:30AM
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DT1.00002: Self-organization of a turbulence-driven ionization instability in hollow cathodes
Marcel Georgin, Benjamin Jorns, Alec Gallimore
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(Author Not Attending)
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DT1.00003: Iodine RF-ICP for Electric Propulsion: Global Model and Experimental Comparisons
Florian Marmuse, Cyril Drag, Anne Bourdon, Jean-Paul Booth, Romain Lucken, Pietro Congedo, Nicolas Sisourat, Olivier Le Maitre, Pascal Chabert
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Tuesday, October 29, 2019
10:45AM - 11:00AM
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DT1.00004: Predicting secondary electron emission rate in Hall Effect Thrusters
Antoine Tavant, Romain Lucken, Anne Bourdon, Pascal Chabert
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Tuesday, October 29, 2019
11:00AM - 11:15AM
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DT1.00005: Hybrid modeling of the anomalous transport inside Hall thrusters
Alejandro Alvarez Laguna, Marc Massot, Pascal Chabert, Anne Bourdon
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Tuesday, October 29, 2019
11:15AM - 11:30AM
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DT1.00006: Genesis of non- uniformity of plasma fluxes over emissive wall in low-temperature plasmas
Irina Schweigert, Mitchell Walker, Michael Keidar
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Session DT2: Plasma Materials I
Chair: Makoto Sekine
Room: Century II
Tuesday, October 29, 2019
10:00AM - 10:15AM
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DT2.00001: Multi-Fluid and PIC Simulation of Ion Energy Distributions through Different Aspect Ratio Holes in Capacitively Coupled Plasma
Yao Du, Yuhua Xiao, Steven Shannon, Sang Ki Nam
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Tuesday, October 29, 2019
10:15AM - 10:30AM
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DT2.00002: Pattern Dependent Profile Distortion in High Aspect Ratio Plasma Etching of SiO$_{\mathrm{2}}$ and SiO$_{\mathrm{2}}$-Si$_{\mathrm{3}}$N$_{\mathrm{4}}$-SiO$_{\mathrm{2}}$ Stacks
Shuo Huang, Sang Ki Nam, Seungbo Shim, Mark J. Kushner
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Tuesday, October 29, 2019
10:30AM - 11:00AM
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DT2.00003: Modeling and controlling of defect generation in electronic devices during plasma etching processes---an optimization methodology of plasma-induced damage
Invited Speaker:
Koji Eriguchi
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Tuesday, October 29, 2019
11:00AM - 11:15AM
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DT2.00004: Why does an SF$_{\mathrm{6}}$ plasma etch silicon much faster than any other fluorine atom generating plasma?
Vincent M Donnelly, Priyanka Arora, Tam Nguyen
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Tuesday, October 29, 2019
11:15AM - 11:30AM
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DT2.00005: High-aspect-ratio organic-pattern formation with self-limiting manner by controlling plasma process based on substrate temperature measurement.
Makoto Sekine, Yusuke Fukunaga, Takayoshi Tsutsumi, Kenji Ishikawa, Hiroki Kondo, Masaru Hori
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Tuesday, October 29, 2019
11:30AM - 11:45AM
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DT2.00006: On finding low Global Warming Potential (GWP) precursor for SiO$_{\mathrm{2}}$ etching through plasma radical measurement
Chul Hee Cho, SiJun Kim, JangJae Lee, YeongSeok Lee, SangHo Lee, InHo Seong, ShinJae You
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Tuesday, October 29, 2019
11:45AM - 12:00PM
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DT2.00007: Student Excellence Award Finalist: Computational study on the formation of Nickel hexafluoroacetylacetonate complexes Ni(hfac)$_{\mathrm{2}}$ on a rough NiO surface during thermal atomic layer etching (ALE) Processes
Abdulrahman Basher, Marjan Krstic, Michiro Isobe, Tomoko Ito, Karin Fink, Masato Kiuchi, Kazuhiro Karahashi, Takae Takeuchi, Wolfgang Wenzel, Satoshi Hamaguchi
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Session DT3: Modeling and Simulation I
Chair: Xiaopu Li
Room: Century III
Tuesday, October 29, 2019
10:00AM - 10:15AM
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DT3.00001: Numerical Study of Discharge Characteristics of Atmospheric Pressure Dielectric Barrier Discharge in Ar/N2 Gas Mixture
Abhishek Kumar Verma, Venkattraman Ayyaswamy
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Tuesday, October 29, 2019
10:15AM - 10:30AM
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DT3.00002: Numerical Modeling of the Plasma-Liquid Interface using the Zapdos-CRANE Open-Source Package
Shane Keniley, Davide Curreli, Corey DeChant, Steven Shannon
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Tuesday, October 29, 2019
10:30AM - 10:45AM
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DT3.00003: Abstract moved to poster session MW1.0091
Preview Abstract |
Tuesday, October 29, 2019
10:45AM - 11:00AM
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DT3.00004: Modeling of RF breakdown in different atmospheres
Zoran Petrovic, Marija Puač, Antonije Đorđević
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Tuesday, October 29, 2019
11:00AM - 11:30AM
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DT3.00005: Kinetic photon transport in low-temperature plasma simulations
Invited Speaker:
Andrew Fierro
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Tuesday, October 29, 2019
11:30AM - 12:00PM
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DT3.00006: On the influence of collisions in the properties of low-temperature plasmas
Invited Speaker:
LL Alves
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Tuesday, October 29, 2019
12:00PM - 12:15PM
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DT3.00007: Modelling the effects of plasma on intracellular metabolism
Tomoyuki Murakami
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