Bulletin of the American Physical Society
72nd Annual Gaseous Electronics Conference
Volume 64, Number 10
Monday–Friday, October 28–November 1 2019; College Station, Texas
Session DT2: Plasma Materials I
10:00 AM–12:00 PM,
Tuesday, October 29, 2019
Room: Century II
Chair: Makoto Sekine
Abstract: DT2.00005 : High-aspect-ratio organic-pattern formation with self-limiting manner by controlling plasma process based on substrate temperature measurement.
11:15 AM–11:30 AM
Preview Abstract Abstract
Authors:
Makoto Sekine
(Nagoya University)
Yusuke Fukunaga
(Nagoya University)
Takayoshi Tsutsumi
(Nagoya University)
Kenji Ishikawa
(Nagoya University)
Hiroki Kondo
(Nagoya University)
Masaru Hori
(Nagoya University)
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