Bulletin of the American Physical Society

65th Annual Gaseous Electronics Conference

Volume 57, Number 8

Monday–Friday, October 22–26, 2012; Austin, Texas

Session Index

Session SR1: Plasma Modeling and Simulations III

Chair: Ikuo Sawada, Tokyo Electron Limited
Room: Amphitheatre 204

Thursday, October 25, 2012 3:30PM - 4:00PM		SR1.00001: Kinetic and electromagnetic effects in technical plasmas Invited Speaker: Denis Eremin Preview Abstract
Thursday, October 25, 2012 4:00PM - 4:15PM		SR1.00002: Thermal mechanism of prepeak formation in Pulsed Glow Discharge Maxim Voronov, Volker Hoffmann, Tobias Steingrobe, Wolfgang Buscher, Carsten Engelhard, Andrew Storey, Steven Ray, Gary Hieftje Preview Abstract
Thursday, October 25, 2012 4:15PM - 4:30PM		SR1.00003: 3D Hydrodynamic Simulations of Atmospherc-Pressure Inductively-Coupled Plasma Torches and Microwave Plasma Torches Peter Williams Preview Abstract
Thursday, October 25, 2012 4:30PM - 4:45PM		SR1.00004: Simulations of pulsed rf plasma sources using CFD-ACE+ Mustafa Megahed, Ananth Bhoj, Sing Ki Nam, Raj Dhindsa Preview Abstract
Thursday, October 25, 2012 4:45PM - 5:00PM		SR1.00005: Links between vortex formation and ambipolar flow in 2D ICP fluid simulations David Urrabazo, Matthew Goeckner Preview Abstract

Session SR2: Plasma Etching II

Chair: Ankur Agarwall, Applied Materials, Inc.
Room: Classroom 203

Thursday, October 25, 2012 3:30PM - 4:00PM		SR2.00001: Physics and chemistry of complex oxide etching and redeposition control Invited Speaker: Jo\"elle Margot Preview Abstract
Thursday, October 25, 2012 4:00PM - 4:15PM		SR2.00002: A complete simulation of InP etching by Cl2/N2/Ar plasma mixture Romain Chanson, Ahmed Rhallabi, Marie Claude Fernandez, Christophe Cardinaud Preview Abstract
Thursday, October 25, 2012 4:15PM - 4:45PM		SR2.00003: Plasma induced UV/VUV damage during Si and GaN device fabrication Invited Speaker: Tetsuya Tatsumi Preview Abstract
Thursday, October 25, 2012 4:45PM - 5:00PM		SR2.00004: Role of Photons, Ion Implantation and Mixing in Sub-threshold Selective Etching of Si Juline Shoeb, Saravanapriyan Sriraman, Tom Kamp, Alex Paterson Preview Abstract
Thursday, October 25, 2012 5:00PM - 5:15PM		SR2.00005: Plasma damage and restoration of a spin-on organic ultra low-k material (k=2.3) Mikolaj Lukaszewicz, Jean-Francois de Marneffe, Christopher J. Wilson, Liping Zhang, Hsin-Ying Peng, Patrick Verdonck, Mikhail Baklanov Preview Abstract
Thursday, October 25, 2012 5:15PM - 5:30PM		SR2.00006: Controlling Ion and UV/VUV Photon Fluxes in Pulsed Low Pressure Plasmas for Materials Processing Peng Tian, Mark J. Kushner Preview Abstract

Session SR3: Electron Collisions with Atoms and Molecules

Chair: Klaus Bartschat, Drake University
Room: Classroom 202

Thursday, October 25, 2012 3:30PM - 4:00PM		SR3.00001: Low-energy electron interactions with water and methanol Invited Speaker: Leigh Hargreaves Preview Abstract
Thursday, October 25, 2012 4:00PM - 4:15PM		SR3.00002: Electron Collision Processes with Carbon Dioxide: Resolving Long-Standing Paradoxes T.N. Rescigno, D.J. Haxton, C.W. McCurdy Preview Abstract
Thursday, October 25, 2012 4:15PM - 4:30PM		SR3.00003: Accuracy of OAMO (Orientation Averaged Molecular Orbital) approximation for calculating electron-impact ionization cross sections for molecules Adam Upshaw, Ben Payne, James Colgan, Don Madison Preview Abstract
Thursday, October 25, 2012 4:30PM - 5:00PM		SR3.00004: Cross Sections for Electron-impact Excitation of Electronic States in Atoms and Molecules -Application Examples of the BE$f$-scaling model in Optically-allowed Transitions Invited Speaker: Hidetoshi Kato Preview Abstract
Thursday, October 25, 2012 5:00PM - 5:15PM		SR3.00005: Relativistic convergent close-coupling calculation of the spin polarization of electrons scattered elastically from zinc and mercury Christopher Bostock, Dmitry Fursa, Igor Bray Preview Abstract
Thursday, October 25, 2012 5:15PM - 5:30PM		SR3.00006: Quantum Control of Diatomic Molecular Vibration States Using Space-Time Discretization Charles Weatherford, Xingjun Zhang Preview Abstract

Session SR4: Plasmas in Liquids

Chair: Natalia Babaeva, University of Michigan
Room: Salon DE

Thursday, October 25, 2012 3:30PM - 3:45PM		SR4.00001: Controlling Cold Plasma Jets Interacting with Liquids Stephan Reuter, Malte Hammer, Joern Winter, Kai Masur, Thomas von Woedtke, Klaus-Dieter Weltmann Preview Abstract
Thursday, October 25, 2012 3:45PM - 4:00PM		SR4.00002: Time-resolved measurement of pressure evolution in underwater nanosecond discharge Ilya Marinov, Olivier Guaitella, Svetlana Starikovskaia, Antoine Rousseau Preview Abstract
Thursday, October 25, 2012 4:00PM - 4:15PM		SR4.00003: Simulations of Images and Optical Spectra of Plasmas Sustained in Bubbles in Water Wei Tian, Mark Kushner Preview Abstract
Thursday, October 25, 2012 4:15PM - 4:30PM		SR4.00004: An efficient method for producing standing sonoplasmas with the help of a metal mesh K. Sasaki, Y. Iwata, S. Tomioka, S. Nishiyama, N. Takada Preview Abstract
Thursday, October 25, 2012 4:30PM - 4:45PM		SR4.00005: Optical emission spectroscopy and shadowgraph imaging of pulsed laser plasmas generated in gaseous, liquid and supercritical CO$_{2}$ Toru Kato, Yoshihiko Takizawa, Sven Stauss, Motoyoshi Baba, Tohru Suemoto, Kazuo Terashima Preview Abstract
Thursday, October 25, 2012 4:45PM - 5:00PM		SR4.00006: Experimental and Modeling Analysis of the Single Micro Bubble Generation by Micro Plasma in Water Peng Xiao, David Staack Preview Abstract
Thursday, October 25, 2012 5:00PM - 5:15PM		SR4.00007: Microsparks Generated by Charged Particles in Dielectric Liquids Robert Geiger Preview Abstract
Thursday, October 25, 2012 5:15PM - 5:30PM		SR4.00008: Pulse discharge in the focus of the converging acoustic wave in the water Valeriy Chernyak, Sergij Sidoruk, Vitalij Yukhymenko, Evgen Martysh, Oleg Fedorovich Preview Abstract

About APS

The American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics.

Headquarters 1 Physics Ellipse, College Park, MD 20740-3844 (301) 209-3200
Editorial Office 100 Motor Pkwy, Suite 110, Hauppauge, NY 11788 (631) 591-4000
Office of Public Affairs 529 14th St NW, Suite 1050, Washington, D.C. 20045-2001 (202) 662-8700